Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10925146 | Ion source chamber with embedded heater | Kevin T. Ryan, Todd Lewis MacEachern, Jeffrey E. Krampert | 2021-02-16 |
| 10290470 | Negative ribbon ion beams from pulsed plasmas | Daniel Distaso, Svetlana B. Radovanov | 2019-05-14 |
| 9734991 | Negative ribbon ion beams from pulsed plasmas | Daniel Distaso, Svetlana B. Radovanov | 2017-08-15 |
| 9287085 | Processing apparatus and method of treating a substrate | Ernest E. Allen, Jon Ballou, Kevin M. Daniels, James P. Buonodono | 2016-03-15 |
| 8698108 | Ion beam measurement system and method | Eric D. Hermanson, Robert J. Mitchell, Tyler Rockwell, James W. Wilkinson, James P. Buonodono +1 more | 2014-04-15 |
| 7652270 | Techniques for ion beam current measurement using a scanning beam current transformer | Costel Biloiu | 2010-01-26 |
| 7564048 | Automated faraday sensor test system | Greg Gibilaro, Gregg Norris, David Olden, Tamer Onat | 2009-07-21 |
| 7521691 | Magnetic monitoring of a Faraday cup for an ion implanter | Morgan Evans, Jay T. Scheuer, Ashwin Shetty, Kenneth Swenson | 2009-04-21 |
| 7498590 | Scan pattern for an ion implanter | — | 2009-03-03 |
| 7442944 | Ion beam implant current, spot width and position tuning | Shengwu Chang, Antonella Cucchetti, Gregory Gibilaro, Rosario Mollica, Gregg Norris +2 more | 2008-10-28 |
| 7383141 | Faraday system integrity determination | Vinay Aggarwal | 2008-06-03 |