Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400824 | Ion extraction optics having novel blocker configuration | Costel Biloiu, Adam Calkins, Kevin M. Daniels, Christopher Campbell | 2025-08-26 |
| 12191117 | Compact low angle ion beam extraction assembly and processing apparatus | Costel Biloiu, Jay Wallace, Solomon Belangedi Basame, Kevin Anglin | 2025-01-07 |
| 12106943 | Substrate halo arrangement for improved process uniformity | Jay Wallace, Simon Ruffell, Kevin Anglin, Christopher Campbell, Kevin M. Daniels +2 more | 2024-10-01 |
| 11056319 | Apparatus and system having extraction assembly for wide angle ion beam | Costel Biloiu, Appu Naveen Thomas, Frank Sinclair, Christopher Campbell | 2021-07-06 |
| 10276340 | Low particle capacitively coupled components for workpiece processing | Morgan Evans, Ernest E. Allen, Richard J. Hertel, Joseph F. Sommers, Christopher Campbell | 2019-04-30 |
| 10224181 | Radio frequency extraction system for charge neutralized ion beam | Costel Biloiu, Piotr Lubicki, Christopher Campbell, Vikram Singh, Kevin M. Daniels +3 more | 2019-03-05 |
| 10193066 | Apparatus and techniques for anisotropic substrate etching | Glen Gilchrist, Raees Pervaiz, Kenneth L. Starks, Shurong Liang | 2019-01-29 |
| 9865433 | Gas injection system for ion beam device | Jay Wallace, Ernest E. Allen, Richard J. Hertel, Alexander C. Kontos, Shurong Liang +1 more | 2018-01-09 |
| 9514912 | Control of ion angular distribution of ion beams with hidden deflection electrode | Costel Biloiu, Peter F. Kurunczi, Christopher Campbell, Vikram Singh, Svetlana B. Radovanov | 2016-12-06 |
| 8907300 | System and method for plasma control using boundary electrode | Svetlana B. Radovanov, Ludovic Godet, Chris Campbell | 2014-12-09 |
| 8698108 | Ion beam measurement system and method | Joseph P. Dzengeleski, Eric D. Hermanson, Robert J. Mitchell, James W. Wilkinson, James P. Buonodono +1 more | 2014-04-15 |
| 7723697 | Techniques for optical ion beam metrology | Alexander S. Perel, Wilhelm P. Platow, Craig R. Chaney, Frank Sinclair | 2010-05-25 |
| 7675047 | Technique for shaping a ribbon-shaped ion beam | Svetlana B. Radovanov, Peter L. Kellerman, Victor M. Benveniste, Robert C. Lindberg, Kenneth H. Purser +2 more | 2010-03-09 |