Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9789434 | Systems and methods for gas pre-separation for detection of substances | Hanh T. Lai, Vibha Mishra | 2017-10-17 |
| 9530615 | Techniques for improving the performance and extending the lifetime of an ion source | Peter F. Kurunczi, Neil J. Bassom | 2016-12-27 |
| 9431247 | Method for ion implantation | Zhimin Wan, Kourosh Saadatmand, Ger-Pin Lin, Ching-I Li, Rekha Padmanabhan +1 more | 2016-08-30 |
| 9269528 | Medium current ribbon beam for ion implantation | Robert Kaim, Charles M. Free, David E. Hoglund, Kourosh Saadatmand | 2016-02-23 |
| 9142379 | Ion source and a method for in-situ cleaning thereof | Bon-Woong Koo, Christopher Campbell, Craig R. Chaney, Robert C. Lindberg, Alexander S. Perel | 2015-09-22 |
| 8912976 | Internal RF antenna with dielectric insulation | Craig R. Chaney | 2014-12-16 |
| 8809800 | Ion source and a method for in-situ cleaning thereof | Bon-Woong Koo, Christopher Campbell, Craig R. Chaney, Robert C. Lindberg, Alexander S. Perel | 2014-08-19 |
| 8466431 | Techniques for improving extracted ion beam quality using high-transparency electrodes | James S. Buff, Svetlana B. Radovanov, Bon-Woong Koo, Frank Sinclair, D. Jeffrey Lischer +7 more | 2013-06-18 |
| 8263944 | Directional gas injection for an ion source cathode assembly | John Bon-Woong Koo, David J. Twiss, Chris Campbell, Frank Sinclair, Alexander S. Perel +2 more | 2012-09-11 |
| 8003956 | Method and apparatus for controlling beam current uniformity in an ion implanter | D. Jeffrey Lischer, John (Bon-Woong) Koo, Peter F. Kurunczi, Shardul S. Patel | 2011-08-23 |
| 8003959 | Ion source cleaning end point detection | Neil J. Bassom, Peter F. Kurunczi, Alexander S. Perel, Craig R. Chaney | 2011-08-23 |
| 7888662 | Ion source cleaning method and apparatus | Costel Biloiu, Craig R. Chaney, Eric R. Cobb, Bon-Woong Koo | 2011-02-15 |
| 7812321 | Techniques for providing a multimode ion source | Peter F. Kurunczi, Rajesh Dorai, Costel Biloiu | 2010-10-12 |
| 7767986 | Method and apparatus for controlling beam current uniformity in an ion implanter | Rajesh Dorai, Peter F. Kurunczi, Alexander S. Perel | 2010-08-03 |
| 7723697 | Techniques for optical ion beam metrology | Alexander S. Perel, Craig R. Chaney, Frank Sinclair, Tyler Rockwell | 2010-05-25 |
| 7413596 | Method and apparatus for the production of purified liquids and vapors | John B. Cracchiolo, Stanislav S. Todorov, Jaime M. Reyes | 2008-08-19 |
| 7397049 | Determining ion beam parallelism using refraction method | Raymond Callahan, David Olson, Stanislav S. Todorov | 2008-07-08 |