Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12139791 | Showerhead faceplates with angled gas distribution passages for semiconductor processing tools | Pratik Mankidy, John Holland, Anthony de la Llera | 2024-11-12 |
| 10854492 | Edge ring assembly for improving feature profile tilting at extreme edge of wafer | William Frederick Bosch, Tamarak Pandhumsoporn, Brett C. Richardson, James C. Vetter, Patrick Chung | 2020-12-01 |
| 9704528 | Apparatus and method for improved perpendicular recording medium using ion implantation in a magnetic field | Alexander C. Kontos, Frank Sinclair | 2017-07-11 |
| 8830616 | Magnetic storage device | Frank Sinclair, Alexander C. Kontos | 2014-09-09 |
| 8692468 | Transformer-coupled RF source for plasma processing tool | Kamal Hadidi | 2014-04-08 |
| 8664561 | System and method for selectively controlling ion composition of ion sources | Kamal Hadidi, Bernard G. Lindsay, Vikram Singh, George D. Papasouliotis | 2014-03-04 |
| 8003498 | Particle beam assisted modification of thin film materials | Jonathan Gerald England, Frank Sinclair, John (Bon-Woong) Koo, Ludovic Godet | 2011-08-23 |
| 7812321 | Techniques for providing a multimode ion source | Peter F. Kurunczi, Costel Biloiu, Wilhelm P. Platow | 2010-10-12 |
| 7767986 | Method and apparatus for controlling beam current uniformity in an ion implanter | Peter F. Kurunczi, Alexander S. Perel, Wilhelm P. Platow | 2010-08-03 |
| 7667208 | Technique for confining secondary electrons in plasma-based ion implantation | — | 2010-02-23 |
| 7655922 | Techniques for confining electrons in an ion implanter | Donna L. Smatlak, Gordon C. Angel | 2010-02-02 |
| 7132672 | Faraday dose and uniformity monitor for plasma based ion implantation | Steven R. Walther, Harold Persing, Jay T. Scheuer, Bon-Woong Koo, Bjorn O. Pedersen +2 more | 2006-11-07 |