SW

Steven R. Walther

VA Varian Semiconductor Equipment Associates: 23 patents #27 of 513Top 6%
HZ Hitachi Zosen: 5 patents #33 of 531Top 7%
MI Mks Instruments: 2 patents #156 of 442Top 40%
SA Siemens Aktiengesellschaft: 2 patents #6,658 of 22,248Top 30%
AT Advanced Ion Beam Technology: 1 patents #40 of 69Top 60%
UE US Dept of Energy: 1 patents #1,355 of 5,099Top 30%
📍 Saalfeld, MA: #1 of 1 inventorsTop 100%
Overall (All Time): #88,363 of 4,157,543Top 3%
37
Patents All Time

Issued Patents All Time

Showing 1–25 of 37 patents

Patent #TitleCo-InventorsDate
12358768 Load-compensating device for a lifting application with an object to be lifted or lowered 2025-07-15
12290697 Process control for atmospheric plasma treatment of surfaces 2025-05-06
11942343 Wafer temperature measurement in an ion implantation system Chien-Li Chen 2024-03-26
10843911 Lifting apparatus 2020-11-24
10076020 Apparatus and method for plasma ignition with a self-resonating device Shaun Smith, Chen-An Wu 2018-09-11
9736920 Apparatus and method for plasma ignition with a self-resonating device Shaun Smith, Chen-An Wu 2017-08-15
8766523 Electron beam exit window in electron beam emitter and method for forming the same Gerald M. Friedman, Michael L. Bufano 2014-07-01
8636949 Electron beam sterilization apparatus Michael L. Bufano, Peter F. Hays, William Frederick Thomson, Arthur Wayne Sommerstein, Gerald M. Friedman +4 more 2014-01-28
8470616 Patterned assembly for manufacturing a solar cell and a method thereof Paul Sullivan, Peter Nunan 2013-06-25
8338796 Electron beam emitter with slotted gun Michael L. Bufano, Gerald M. Friedman 2012-12-25
8339024 Methods and apparatuses for reducing heat on an emitter exit window Gerald M. Friedman, Michael L. Bufano 2012-12-25
8319196 Technique for low-temperature ion implantation Jonathan Gerald England, Richard S. Muka, Julian G. Blake, Paul J. Murphy, Reuel B. Liebert 2012-11-27
8293173 Electron beam sterilization apparatus Michael L. Bufano, Peter F. Hays, William Frederick Thomson, Arthur Wayne Sommerstein, Gerald M. Friedman +4 more 2012-10-23
8222053 Patterned assembly for manufacturing a solar cell and a method thereof Paul Sullivan, Peter Nunan 2012-07-17
7993698 Techniques for temperature controlled ion implantation Julian G. Blake, Jonathan Gerald England, Scott C. Holden, Reuel B. Liebert, Richard S. Muka +4 more 2011-08-09
7939424 Wafer bonding activated by ion implantation Yuri Erokhin, Paul Sullivan, Peter Nunan 2011-05-10
7935942 Technique for low-temperature ion implantation Jonathan Gerald England, Richard S. Muka, Julian G. Blake, Paul J. Murphy, Reuel B. Liebert 2011-05-03
7820460 Patterned assembly for manufacturing a solar cell and a method thereof Paul Sullivan, Peter Nunan 2010-10-26
7820527 Cleave initiation using varying ion implant dose Peter Nunan, Yuri Erokhin, Paul Sullivan 2010-10-26
7820987 Predicting dose repeatability in an ion implantation Morgan Evans, Norman E. Hussey, Rekha Padmanabhan 2010-10-26
7675730 Techniques for detecting wafer charging in a plasma processing system Bon-Woong Koo, Bernard G. Lindsay 2010-03-09
7638781 Local pressure sensing in a plasma processing system Harold Persing 2009-12-29
7615748 Outgassing rate detection Harold Persing 2009-11-10
7544959 In situ surface contamination removal for ion implanting Sandeep Mehta, Naushad K. Variam, Ukyo Jeong 2009-06-09
7544957 Non-uniform ion implantation Sandeep Mehta 2009-06-09