Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027489 | Systems and methods for fabricating silicon die stacks for electron emitter array chips | Ghiyuun KANG | 2024-07-02 |
| 7993698 | Techniques for temperature controlled ion implantation | Julian G. Blake, Jonathan Gerald England, Scott C. Holden, Steven R. Walther, Reuel B. Liebert +4 more | 2011-08-09 |
| 7544959 | In situ surface contamination removal for ion implanting | Steven R. Walther, Sandeep Mehta, Naushad K. Variam | 2009-06-09 |
| 7459703 | Ion implant beam angle integrity monitoring and adjusting | Steven R. Walther, Sandeep Mehta | 2008-12-02 |
| 7378335 | Plasma implantation of deuterium for passivation of semiconductor-device interfaces | Steven R. Walther, Sandeep Mehta, Naushad K. Variam | 2008-05-27 |