Issued Patents All Time
Showing 1–25 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11875967 | System apparatus and method for enhancing electrical clamping of substrates using photo-illumination | Qin Chen, Michael W. Osborne, Steven M. Anella, Jonathan D. Fischer | 2024-01-16 |
| 11538714 | System apparatus and method for enhancing electrical clamping of substrates using photo-illumination | Qin Chen, Michael W. Osborne, Steven M. Anella, Jonathan D. Fischer | 2022-12-27 |
| 11315819 | System apparatus and method for enhancing electrical clamping of substrates using photo-illumination | Qin Chen, Michael W. Osborne, Steven M. Anella, Jonathan D. Fischer | 2022-04-26 |
| 11069554 | Carbon nanotube electrostatic chuck | Dawei Sun, Steven M. Anella, Qin Chen, Ron Serisky, David J. Chipman | 2021-07-20 |
| 10866503 | Low emission implantation mask and substrate assembly | Frank Sinclair | 2020-12-15 |
| 10825645 | System and method for reduced workpiece adhesion due to electrostatic charge during removal from a processing station | Eric D. Wilson, David E. Suuronen, Michael W. Osborne | 2020-11-03 |
| 10811214 | Low emission cladding and ion implanter | Frank Sinclair | 2020-10-20 |
| 10385454 | Diffusion resistant electrostatic clamp | Dale K. Stone, Richard A. Cooke, I-Kuan Lin, Lyudmila Stone | 2019-08-20 |
| 9824857 | Method for implantation of semiconductor wafers having high bulk resistivity | Michael W. Osborne, David E. Suuronen | 2017-11-21 |
| 9799492 | Textured silicon liners in substrate processing systems | — | 2017-10-24 |
| 9728430 | Electrostatic chuck with LED heating | Jason M. Schaller, William T. Weaver, Morgan Evans, Robert Brent Vopat, Paul E. Pergande +2 more | 2017-08-08 |
| 9692325 | High conductivity electrostatic chuck | David E. Suuronen, Lyudmila Stone, Dale K. Stone, Richard A. Cooke, Steven Donnell +1 more | 2017-06-27 |
| 9644269 | Diffusion resistant electrostatic clamp | Dale K. Stone, Richard A. Cooke, I-Kuan Lin, Lyudmila Stone | 2017-05-09 |
| 9613839 | Control of workpiece temperature via backside gas flow | — | 2017-04-04 |
| 9567691 | Melt purification and delivery system | Peter L. Kellerman, Frank Sinclair, Frederick M. Carlson | 2017-02-14 |
| 9437397 | Textured silicon liners in substrate processing systems | — | 2016-09-06 |
| 9093104 | Technique for manufacturing bit patterned media | Frank Sinclair, Helen L. Maynard, Alexander C. Kontos | 2015-07-28 |
| 9082804 | Triboelectric charge controlled electrostatic clamp | Dale K. Stone, Lyudmila Stone, David E. Suuronen, Shigeo Oshiro | 2015-07-14 |
| 9025305 | High surface resistivity electrostatic chuck | Richard A. Cooke, Dale K. Stone, Lyudmila Stone, David E. Suuronen | 2015-05-05 |
| 8814239 | Techniques for handling media arrays | Paul Forderhase, William T. Weaver | 2014-08-26 |
| 8746666 | Media carrier | Richard J. Hertel, Edward D. MacIntosh, Alexander C. Kontos, Frank Sinclair, Christopher A. Rowland +2 more | 2014-06-10 |
| 8709533 | Technique for manufacturing bit patterned media | Frank Sinclair | 2014-04-29 |
| 8672311 | Method of cooling textured workpieces with an electrostatic chuck | Dale K. Stone, D. Jeffrey Lischer | 2014-03-18 |
| 8669540 | System and method for gas leak control in a substrate holder | Timothy J. Miller, Richard S. Muka | 2014-03-11 |
| 8598021 | Method for junction avoidance on edge of workpieces | Dale K. Stone | 2013-12-03 |