Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825645 | System and method for reduced workpiece adhesion due to electrostatic charge during removal from a processing station | Eric D. Wilson, Michael W. Osborne, Julian G. Blake | 2020-11-03 |
| 10658207 | Platen for reducing particle contamination on a substrate and a method thereof | Dale K. Stone, Shigeo Oshiro, Arthur P. Riaf, Edward D. MacIntosh | 2020-05-19 |
| 10113917 | System and method for in situ temperature measurement | — | 2018-10-30 |
| 9953849 | Platen for reducing particle contamination on a substrate and a method thereof | Dale K. Stone, Shigeo Oshiro, Arthur P. Riaf, Edward D. MacIntosh | 2018-04-24 |
| 9824857 | Method for implantation of semiconductor wafers having high bulk resistivity | Michael W. Osborne, Julian G. Blake | 2017-11-21 |
| 9692325 | High conductivity electrostatic chuck | Lyudmila Stone, Julian G. Blake, Dale K. Stone, Richard A. Cooke, Steven Donnell +1 more | 2017-06-27 |
| 9417280 | System and method for analyzing voltage breakdown in electrostatic chucks | Scott E. Peitzsch | 2016-08-16 |
| 9082804 | Triboelectric charge controlled electrostatic clamp | Julian G. Blake, Dale K. Stone, Lyudmila Stone, Shigeo Oshiro | 2015-07-14 |
| 9025305 | High surface resistivity electrostatic chuck | Richard A. Cooke, Dale K. Stone, Lyudmila Stone, Julian G. Blake | 2015-05-05 |
| 8681472 | Platen ground pin for connecting substrate to ground | Dale K. Stone, Shigeo Oshiro, Arthur P. Riaf, Edward D. MacIntosh | 2014-03-25 |
| 8592786 | Platen clamping surface monitoring | Julian G. Blake, Kurt Decker-Lucke, James C. Carroll, Klaus Petry | 2013-11-26 |
| 8531814 | Removal of charge between a substrate and an electrostatic clamp | Dale K. Stone, Lyudmila Stone, Klaus Petry, Julian G. Blake | 2013-09-10 |
| 8268081 | Platen cleaning method | Frederick B. Ammon, David Burgdorf, Lyudmila Stone | 2012-09-18 |
| 7715170 | Electrostatic chuck with separated electrodes | Julian G. Blake, Dale K. Stone, Lyudmila Stone | 2010-05-11 |
| 7595972 | Clamp for use in processing semiconductor workpieces | Richard S. Muka, Paul J. Murphy | 2009-09-29 |
| 5426411 | Current limiting fuse | Robert M. Pimpis | 1995-06-20 |
| 5357234 | Current limiting fuse | Robert M. Pimpis, Richard J. Perreault, George F. Walker, Edward J. Knapp, Jr. | 1994-10-18 |
| 5148141 | Fuse with thin film fusible element supported on a substrate | — | 1992-09-15 |
| 5115220 | Fuse with thin film fusible element supported on a substrate | Jean C. Terry | 1992-05-19 |
| 5091712 | Thin film fusible element | — | 1992-02-25 |
| 4962977 | Electric fuse | — | 1990-10-16 |
| 4950195 | Cartridge fuse terminal adapter | Richard J. Perreault | 1990-08-21 |