Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10658207 | Platen for reducing particle contamination on a substrate and a method thereof | David E. Suuronen, Dale K. Stone, Shigeo Oshiro, Edward D. MacIntosh | 2020-05-19 |
| 10001161 | Rotary flex union | — | 2018-06-19 |
| 9953849 | Platen for reducing particle contamination on a substrate and a method thereof | David E. Suuronen, Dale K. Stone, Shigeo Oshiro, Edward D. MacIntosh | 2018-04-24 |
| 9377048 | Rotary flex union | — | 2016-06-28 |
| 8963337 | Thin wafer support assembly | — | 2015-02-24 |
| 8681472 | Platen ground pin for connecting substrate to ground | David E. Suuronen, Dale K. Stone, Shigeo Oshiro, Edward D. MacIntosh | 2014-03-25 |
| 8149256 | Techniques for changing temperature of a platen | Roger B. Fish, Samuel M. Barsky, Scott C. Holden, Steven M. Anella | 2012-04-03 |