Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11875967 | System apparatus and method for enhancing electrical clamping of substrates using photo-illumination | Qin Chen, Julian G. Blake, Michael W. Osborne, Jonathan D. Fischer | 2024-01-16 |
| 11651986 | System for isolating electrodes at cryogenic temperatures | Jonathan D. Fischer, Manohara Kumar | 2023-05-16 |
| 11557496 | Load lock with integrated features | Michael Blanchard, Brant S. Binns, Jordan B. Tye, D. Jeffrey Lischer | 2023-01-17 |
| 11543296 | Method and apparatus for calibration of substrate temperature using pyrometer | Eric D. Wilson, D. Jeffrey Lischer, James McLane, Bradley M. Pomerleau, Dawei Sun | 2023-01-03 |
| 11538714 | System apparatus and method for enhancing electrical clamping of substrates using photo-illumination | Qin Chen, Julian G. Blake, Michael W. Osborne, Jonathan D. Fischer | 2022-12-27 |
| 11473978 | Enhanced substrate temperature measurement apparatus, system and method | Dawei Sun, D. Jeffrey Lischer, Qin Chen, Dale K. Stone, Lyudmila Stone +2 more | 2022-10-18 |
| 11315819 | System apparatus and method for enhancing electrical clamping of substrates using photo-illumination | Qin Chen, Julian G. Blake, Michael W. Osborne, Jonathan D. Fischer | 2022-04-26 |
| 11069554 | Carbon nanotube electrostatic chuck | Dawei Sun, Qin Chen, Ron Serisky, Julian G. Blake, David J. Chipman | 2021-07-20 |
| 10826218 | Thermally insulating electrical contact probe | Michael A. Schrameyer | 2020-11-03 |
| 10109510 | Apparatus for improving temperature uniformity of a workpiece | Michael A. Schrameyer | 2018-10-23 |
| 10032601 | Platen support structure | Roger B. Fish, Todd Lewis MacEachern | 2018-07-24 |
| 9633875 | Apparatus for improving temperature uniformity of a workpiece | Dawei Sun, D. Jeffrey Lischer, Dale K. Stone, Lyudmila Stone | 2017-04-25 |
| 9484183 | Linkage conduit for vacuum chamber applications | Eric D. Hermanson, Robert J. Mitchell, Jeffrey Blahnik, William T. Weaver, Michael Paul Rohrer +1 more | 2016-11-01 |
| 9338829 | Heated platen with improved temperature uniformity | Roger B. Fish | 2016-05-10 |
| 9108322 | Force sensing system for substrate lifting apparatus | Richard V. Chisholm, Scott E. Peitzsch, Michael Esposito, Robert A. Poitras, Daniel A. Hall +2 more | 2015-08-18 |
| 9000446 | Techniques for processing a substrate | Benjamin B. Riordon, Kevin M. Daniels, William T. Weaver | 2015-04-07 |
| 8461553 | Masked ion implant with fast-slow scan | Nicholas P. T. Bateman, Benjamin B. Riordon, Atul Gupta | 2013-06-11 |
| 8354653 | Techniques for manufacturing solar cells | — | 2013-01-15 |
| 8216923 | Integrated shadow mask/carrier for patterned ion implantation | Nicholas P. T. Bateman, Kevin M. Daniels, Atul Gupta, Russell J. Low, Benjamin B. Riordon +1 more | 2012-07-10 |
| 8202789 | Implanting a solar cell substrate using a mask | William T. Weaver | 2012-06-19 |
| 8149256 | Techniques for changing temperature of a platen | Roger B. Fish, Samuel M. Barsky, Scott C. Holden, Arthur P. Riaf | 2012-04-03 |
| 8008176 | Masked ion implant with fast-slow scan | Nicholas P. T. Bateman, Benjamin B. Riordon, Atul Gupta | 2011-08-30 |
| 5996206 | Method and apparatus for installing and aligning punches in an imaging system | Richard J. Lynch, Robert P. Flanagan, Jr., Libor Krupica, James D. Waterman | 1999-12-07 |