Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11543296 | Method and apparatus for calibration of substrate temperature using pyrometer | Eric D. Wilson, Steven M. Anella, D. Jeffrey Lischer, James McLane, Dawei Sun | 2023-01-03 |
| 11545375 | Hybrid control system for workpiece heating | James D. Strassner, D. Jeffrey Lischer, Dawei Sun, Michael Paul Rohrer | 2023-01-03 |
| 9817407 | System and method of opening a load lock door valve at a desired pressure after venting | Eric D. Wilson | 2017-11-14 |