Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278124 | Model-based controlled load lock pumping scheme | Bon-Woong Koo, Dawei Sun, Chi-Yang Cheng, Paul J. Murphy, Frank Sinclair +4 more | 2025-04-15 |
| 11557496 | Load lock with integrated features | Michael Blanchard, Steven M. Anella, Brant S. Binns, Jordan B. Tye | 2023-01-17 |
| 11543296 | Method and apparatus for calibration of substrate temperature using pyrometer | Eric D. Wilson, Steven M. Anella, James McLane, Bradley M. Pomerleau, Dawei Sun | 2023-01-03 |
| 11545375 | Hybrid control system for workpiece heating | James D. Strassner, Bradley M. Pomerleau, Dawei Sun, Michael Paul Rohrer | 2023-01-03 |
| 11473978 | Enhanced substrate temperature measurement apparatus, system and method | Dawei Sun, Qin Chen, Dale K. Stone, Lyudmila Stone, Steven M. Anella +2 more | 2022-10-18 |
| 10443934 | Substrate handling and heating system | Morgan Evans, Jason M. Schaller, Ala Moradian, William T. Weaver, Robert Brent Vopat | 2019-10-15 |
| 9685303 | Apparatus for heating and processing a substrate | Morgan Evans, Jason M. Schaller, Ala Moradian | 2017-06-20 |
| 9633875 | Apparatus for improving temperature uniformity of a workpiece | Dawei Sun, Steven M. Anella, Dale K. Stone, Lyudmila Stone | 2017-04-25 |
| 9633886 | Hybrid thermal electrostatic clamp | Morgan Evans, Jason M. Schaller, Ala Moradian, Gregory Thronson | 2017-04-25 |
| 9287148 | Dynamic heating method and system for wafer processing | Morgan Evans, Kevin Anglin, William T. Weaver, Jason M. Schaller, Robert Brent Vopat | 2016-03-15 |
| 8933335 | Current lead with a configuration to reduce heat load transfer in an alternating electrical current environment | Gregory Citver, Frank Sinclair, Nandishkumar Desai | 2015-01-13 |
| 8672311 | Method of cooling textured workpieces with an electrostatic chuck | Dale K. Stone, Julian G. Blake | 2014-03-18 |
| 8466431 | Techniques for improving extracted ion beam quality using high-transparency electrodes | James S. Buff, Svetlana B. Radovanov, Bon-Woong Koo, Wilhelm P. Platow, Frank Sinclair +7 more | 2013-06-18 |
| 8455760 | Interfacing two insulation parts in high voltage environment | Russell J. Low, Kasegn D. Tekletsadik, Anthony Renau, Piotr Lubicki, Steve Krause +2 more | 2013-06-04 |
| 8143604 | Insulator system for a terminal structure of an ion implantation system | Russell J. Low, Piortr R. Lubicki, Steve Krause, Eric D. Hermanson, Joseph C. Olson | 2012-03-27 |
| 8003956 | Method and apparatus for controlling beam current uniformity in an ion implanter | John (Bon-Woong) Koo, Peter F. Kurunczi, Shardul S. Patel, Wilhelm P. Platow | 2011-08-23 |
| 7863520 | Interfacing two insulation parts in high voltage environment | Russell J. Low, Kasegn D. Tekletsadik, Anthony Renau, Piotr Lubicki, Steve Krause +2 more | 2011-01-04 |
| 7528392 | Techniques for low-temperature ion implantation | Jonathan Gerald England, Richard S. Muka | 2009-05-05 |
| 6993973 | Contaminant deposition control baffle for a capacitive pressure transducer | Robert Traverso | 2006-02-07 |
| 6105436 | Capacitive pressure transducer with improved electrode support | Steven D. Blankenship | 2000-08-22 |
| 5966499 | System for delivering a substantially constant vapor flow to a chemical process reactor | Luke D. Hinkle | 1999-10-12 |
| 5868159 | Pressure-based mass flow controller | James F. Loan, John P. Lefavour, Laura A. Sullivan, David C. Planchard | 1999-02-09 |