SP

Shardul S. Patel

VA Varian Semiconductor Equipment Associates: 9 patents #90 of 513Top 20%
Applied Materials: 5 patents #2,165 of 7,310Top 30%
📍 North Reading, MA: #19 of 228 inventorsTop 9%
🗺 Massachusetts: #8,835 of 88,656 inventorsTop 10%
Overall (All Time): #329,532 of 4,157,543Top 8%
14
Patents All Time

Issued Patents All Time

Showing 1–14 of 14 patents

Patent #TitleCo-InventorsDate
12191113 Systems and methods for optimizing full horizontal scanned beam distance Tyler Wills, George M. Gammel, Eric D. Wilson, Jay T. Scheuer, Xiangdong He +1 more 2025-01-07
12154766 Ion source having different modes of operation Graham Wright 2024-11-26
12094681 Hybrid ion source for aluminum ion generation using a target holder and a solid target Graham Wright 2024-09-17
12040154 Hybrid ion source for aluminum ion generation using organoaluminium compounds and a solid target Graham Wright 2024-07-16
11149345 Cryogenically cooled rotatable electrostatic chuck Robert J. Mitchell 2021-10-19
10704693 Cryogenic ferrofluid sealed rotary union Robert J. Mitchell, Roger B. Fish 2020-07-07
9793086 SiC coating in an ion implanter Robert J. Mason, Robert H. Bettencourt, Timothy J. Miller 2017-10-17
9384937 SiC coating in an ion implanter Robert J. Mason, Robert H. Bettencourt, Timothy J. Miller 2016-07-05
8907295 Hybrid electrostatic lens with increased natural frequency Oliver V. Naumovski, Charles A. Teodorczyk 2014-12-09
8466431 Techniques for improving extracted ion beam quality using high-transparency electrodes James S. Buff, Svetlana B. Radovanov, Bon-Woong Koo, Wilhelm P. Platow, Frank Sinclair +7 more 2013-06-18
8436318 Apparatus for controlling the temperature of an RF ion source window Frank Sinclair, Costel Biloiu, Bon-Woong Koo, Victor M. Benveniste 2013-05-07
8188448 Temperature controlled ion source Victor M. Benveniste, Bon-Woong Koo, Frank Sinclair 2012-05-29
8183542 Temperature controlled ion source Victor M. Benveniste, Bon-Woong Koo, Frank Sinclair 2012-05-22
8003956 Method and apparatus for controlling beam current uniformity in an ion implanter D. Jeffrey Lischer, John (Bon-Woong) Koo, Peter F. Kurunczi, Wilhelm P. Platow 2011-08-23