Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12191113 | Systems and methods for optimizing full horizontal scanned beam distance | Tyler Wills, George M. Gammel, Eric D. Wilson, Jay T. Scheuer, Xiangdong He +1 more | 2025-01-07 |
| 12154766 | Ion source having different modes of operation | Graham Wright | 2024-11-26 |
| 12094681 | Hybrid ion source for aluminum ion generation using a target holder and a solid target | Graham Wright | 2024-09-17 |
| 12040154 | Hybrid ion source for aluminum ion generation using organoaluminium compounds and a solid target | Graham Wright | 2024-07-16 |
| 11149345 | Cryogenically cooled rotatable electrostatic chuck | Robert J. Mitchell | 2021-10-19 |
| 10704693 | Cryogenic ferrofluid sealed rotary union | Robert J. Mitchell, Roger B. Fish | 2020-07-07 |
| 9793086 | SiC coating in an ion implanter | Robert J. Mason, Robert H. Bettencourt, Timothy J. Miller | 2017-10-17 |
| 9384937 | SiC coating in an ion implanter | Robert J. Mason, Robert H. Bettencourt, Timothy J. Miller | 2016-07-05 |
| 8907295 | Hybrid electrostatic lens with increased natural frequency | Oliver V. Naumovski, Charles A. Teodorczyk | 2014-12-09 |
| 8466431 | Techniques for improving extracted ion beam quality using high-transparency electrodes | James S. Buff, Svetlana B. Radovanov, Bon-Woong Koo, Wilhelm P. Platow, Frank Sinclair +7 more | 2013-06-18 |
| 8436318 | Apparatus for controlling the temperature of an RF ion source window | Frank Sinclair, Costel Biloiu, Bon-Woong Koo, Victor M. Benveniste | 2013-05-07 |
| 8188448 | Temperature controlled ion source | Victor M. Benveniste, Bon-Woong Koo, Frank Sinclair | 2012-05-29 |
| 8183542 | Temperature controlled ion source | Victor M. Benveniste, Bon-Woong Koo, Frank Sinclair | 2012-05-22 |
| 8003956 | Method and apparatus for controlling beam current uniformity in an ion implanter | D. Jeffrey Lischer, John (Bon-Woong) Koo, Peter F. Kurunczi, Wilhelm P. Platow | 2011-08-23 |