Issued Patents All Time
Showing 1–25 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1051838 | Single-slot tubular cathode | Bon-Woong Koo, Frank Sinclair, Alexandre Likhanskii, Alexander S. Perel, Graham Wright +6 more | 2024-11-19 |
| 11631567 | Ion source with single-slot tubular cathode | Bon-Woong Koo, Frank Sinclair, Alexandre Likhanskii, Alexander S. Perel, Graham Wright +6 more | 2023-04-18 |
| 11600473 | Ion source with biased extraction plate | Bon-Woong Koo, Alexandre Likhanskii | 2023-03-07 |
| 11424097 | Ion source with tubular cathode | Bon-Woong Koo, Frank Sinclair, You Chia Li, Peter Ewing, Ajdin Sarajlic +2 more | 2022-08-23 |
| D956005 | Shaped electrode | Robert C. Lindberg, Alexandre Likhanskii, Wayne LeBlanc, Frank Sinclair | 2022-06-28 |
| 11127557 | Ion source with single-slot tubular cathode | Bon-Woong Koo, Frank Sinclair, Alexandre Likhanskii, Alexander S. Perel, Graham Wright +6 more | 2021-09-21 |
| 11049691 | Ion beam quality control using a movable mass resolving device | Bon-Woong Koo, Robert C. Lindberg, Eric D. Hermanson, Frank Sinclair, Antonella Cucchetti +3 more | 2021-06-29 |
| 10923306 | Ion source with biased extraction plate | Bon-Woong Koo, Alexandre Likhanskii | 2021-02-16 |
| 10748738 | Ion source with tubular cathode | Bon-Woong Koo, Frank Sinclair, You Chia Li, Peter Ewing, Ajdin Sarajlic +2 more | 2020-08-18 |
| 10468224 | Apparatus and method for controlling ion beam properties using energy filter | Ana Samolov, Shengwu Chang, Frank Sinclair, Peter L. Kellerman | 2019-11-05 |
| 10290462 | High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture | Bon-Woong Koo, Alexandre Likhanskii, Anthony Renau | 2019-05-14 |
| 10290470 | Negative ribbon ion beams from pulsed plasmas | Daniel Distaso, Joseph P. Dzengeleski | 2019-05-14 |
| 10290466 | Boron implanting using a co-gas | Bon-Woong Koo, Vikram M. Bhosle, John A. Frontiero, Nicholas P. T. Bateman, Timothy J. Miller +3 more | 2019-05-14 |
| 10049861 | Inductively coupled RF plasma source with magnetic confinement and Faraday shielding | Victor M. Benveniste, Costel Biloiu | 2018-08-14 |
| 9988711 | Apparatus and method for multilayer deposition | Alexandre Likhanskii, William Davis Lee | 2018-06-05 |
| 9922795 | High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture | Bon-Woong Koo, Alexandre Likhanskii, Anthony Renau | 2018-03-20 |
| 9865430 | Boron implanting using a co-gas | Bon-Woong Koo, Vikram M. Bhosle, John A. Frontiero, Nicholas P. T. Bateman, Timothy J. Miller +3 more | 2018-01-09 |
| 9840772 | Method of improving ion beam quality in a non-mass-analyzed ion implantation system | Bon-Woong Koo, Christopher J. Leavitt, John A. Frontiero, Timothy J. Miller | 2017-12-12 |
| 9734991 | Negative ribbon ion beams from pulsed plasmas | Daniel Distaso, Joseph P. Dzengeleski | 2017-08-15 |
| 9677171 | Method of improving ion beam quality in a non-mass-analyzed ion implantation system | Bon-Woong Koo, Christopher J. Leavitt, John A. Frontiero, Timothy J. Miller | 2017-06-13 |
| 9613777 | Uniformity control using adjustable internal antennas | Alexandre Likhanskii | 2017-04-04 |
| 9536712 | Apparatus and method for mass analyzed ion beam | W. Davis Lee, Peter F. Kurunczi | 2017-01-03 |
| 9520259 | Ion beam uniformity control | Alexandre Likhanskii, Bon-Woong Koo | 2016-12-13 |
| 9514912 | Control of ion angular distribution of ion beams with hidden deflection electrode | Costel Biloiu, Peter F. Kurunczi, Tyler Rockwell, Christopher Campbell, Vikram Singh | 2016-12-06 |
| 9478399 | Multi-aperture extraction system for angled ion beam | Alexandre Likhanskii, William Davis Lee | 2016-10-25 |