Issued Patents All Time
Showing 1–25 of 69 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11996266 | Apparatus and techniques for substrate processing using independent ion source and radical source | Joseph C. Olson, Peter F. Kurunczi | 2024-05-28 |
| 11862433 | System and methods using an inline surface engineering source | Christopher R. Hatem, Peter F. Kurunczi, Christopher A. Rowland, Joseph C. Olson | 2024-01-02 |
| 11574800 | Extreme edge uniformity control | Alexandre Likhanskii, Maureen Petterson, John Hautala, Christopher A. Rowland, Costel Biloiu | 2023-02-07 |
| 11569063 | Apparatus, system and method for energy spread ion beam | Paul J. Murphy, Frank Sinclair, Jun Lu, Daniel R. Tieger | 2023-01-31 |
| 11217427 | System, apparatus and method for bunched ribbon ion beam | — | 2022-01-04 |
| 11069511 | System and methods using an inline surface engineering source | Christopher R. Hatem, Peter F. Kurunczi, Christopher A. Rowland, Joseph C. Olson | 2021-07-20 |
| 10990014 | Performance improvement of EUV photoresist by ion implantation | Tristan Y. Ma, Huixiong Dai, John Hautala, Joseph C. Olson | 2021-04-27 |
| 10930735 | Gate all around device and method of formation using angled ions | Min Gyu Sung, Sony Varghese, Morgan Evans, Joseph C. Olson | 2021-02-23 |
| 10903211 | Gate devices and methods of formation using angled ions | Min Gyu Sung, Sony Varghese, Morgan Evans, Naushad K. Variam, Tassie Andersen | 2021-01-26 |
| 10886279 | Device structure for forming semiconductor device having angled contacts | Sony Varghese, Morgan Evans, John Hautala, Joe Olson | 2021-01-05 |
| 10692872 | Device structure for forming semiconductor device having angled contacts | Sony Varghese, Morgan Evans, John Hautala, Joe Olson | 2020-06-23 |
| 10665433 | Extreme edge uniformity control | Alexandre Likhanskii, Maureen Petterson, John Hautala, Christopher A. Rowland, Costel Biloiu | 2020-05-26 |
| 10607847 | Gate all around device and method of formation using angled ions | Min Gyu Sung, Sony Varghese, Morgan Evans, Joseph C. Olson | 2020-03-31 |
| 10545408 | Performance improvement of EUV photoresist by ion implantation | Tristan Y. Ma, Huixiong Dai, John Hautala, Joseph C. Olson | 2020-01-28 |
| 10290462 | High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture | Bon-Woong Koo, Alexandre Likhanskii, Svetlana B. Radovanov | 2019-05-14 |
| 9922795 | High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture | Bon-Woong Koo, Alexandre Likhanskii, Svetlana B. Radovanov | 2018-03-20 |
| 9847228 | Method for selectively depositing a layer on a three dimensional structure | Simon Ruffell, Thomas R. Omstead | 2017-12-19 |
| 9773636 | Apparatus and method for generating high current negative hydrogen ion beam | W. Davis Lee, Neil J. Bassom | 2017-09-26 |
| 9620335 | In situ control of ion angular distribution in a processing apparatus | Costel Biloiu, Nini Munoz, Ludovic Godet | 2017-04-11 |
| 9520360 | Angled ion beam processing of heterogeneous structure | Christopher R. Hatem | 2016-12-13 |
| 9455335 | Techniques for ion implantation of non-planar field effect transistors | Hans-Joachim L. Gossmann | 2016-09-27 |
| 9453279 | Method for selectively depositing a layer on a three dimensional structure | Simon Ruffell, Thomas R. Omstead | 2016-09-27 |
| 9425027 | Methods of affecting material properties and applications therefor | Ludovic Godet, Christopher R. Hatem, Deepak A. Ramappa, Xianfeng Lu, Patrick M. Martin | 2016-08-23 |
| 9337040 | Angled ion beam processing of heterogeneous structure | Christopher R. Hatem | 2016-05-10 |
| 9293301 | In situ control of ion angular distribution in a processing apparatus | Costel Biloiu, Nini Munoz, Ludovic Godet | 2016-03-22 |