Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9620335 | In situ control of ion angular distribution in a processing apparatus | Costel Biloiu, Ludovic Godet, Anthony Renau | 2017-04-11 |
| 9336998 | Apparatus and method for dynamic control of ion beam energy and angle | Ludovic Godet, Daniel Distaso, Tristan Y. Ma, Yu-Kang Liu | 2016-05-10 |
| 9293301 | In situ control of ion angular distribution in a processing apparatus | Costel Biloiu, Ludovic Godet, Anthony Renau | 2016-03-22 |