Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11456205 | Methods for variable etch depths | Morgan Evans, Joseph C. Olson, Rutger Meyer Timmerman Thijssen, Ryan Boas | 2022-09-27 |
| 10904996 | Substrate support with electrically floating power supply | Travis Koh, Haitao Wang, Philip Allan Kraus, Vijay D. Parkhe, Christopher A. Rowland +2 more | 2021-01-26 |
| 10290470 | Negative ribbon ion beams from pulsed plasmas | Svetlana B. Radovanov, Joseph P. Dzengeleski | 2019-05-14 |
| 10081861 | Selective processing of a workpiece | Morgan Evans, Stanislav S. Todorov, Mark R. Amato, William Davis Lee, Jillian Reno | 2018-09-25 |
| 9734991 | Negative ribbon ion beams from pulsed plasmas | Svetlana B. Radovanov, Joseph P. Dzengeleski | 2017-08-15 |
| 9336998 | Apparatus and method for dynamic control of ion beam energy and angle | Ludovic Godet, Nini Munoz, Tristan Y. Ma, Yu-Kang Liu | 2016-05-10 |
| 9118001 | Techniques for treating sidewalls of patterned structures using angled ion treatment | Ludovic Godet, John Hautala, Christopher Campbell | 2015-08-25 |
| 8590485 | Small form factor plasma source for high density wide ribbon ion beam generation | Costel Biloiu, Jay T. Scheuer, Joseph C. Olson, Frank Sinclair | 2013-11-26 |
| 8461554 | Apparatus and method for charge neutralization during processing of a workpiece | Peter F. Kurunczi, Christopher J. Leavitt, Timothy J. Miller | 2013-06-11 |
| 8461556 | Using beam blockers to perform a patterned implant of a workpiece | Russell J. Low | 2013-06-11 |
| 7878145 | Monitoring plasma ion implantation systems for fault detection and process control | Ziwei Fang, Sung-Cheon Ko, Edmund J. Winder, Ludovic Godet, Bon-Woong Koo +1 more | 2011-02-01 |
| 7138768 | Indirectly heated cathode ion source | Peter E. Maciejowski, Joseph C. Olson, Shengwu Chang, Bjorn O. Pedersen, Leo V. Klos +1 more | 2006-11-21 |
| 6777686 | Control system for indirectly heated cathode ion source | Joseph C. Olson, Anthony Renau | 2004-08-17 |