Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165852 | Cover ring to mitigate carbon contamination in plasma doping chamber | Vikram M. Bhosle, Timothy J. Miller, Eric D. Hermanson, Jordan B. Tye | 2024-12-10 |
| 11615945 | Plasma processing apparatus and techniques | Vikram M. Bhosle, Guillermo Colom, Timothy J. Miller | 2023-03-28 |
| 11120973 | Plasma processing apparatus and techniques | Vikram M. Bhosle, Guillermo Colom, Timothy J. Miller | 2021-09-14 |
| 10290466 | Boron implanting using a co-gas | Bon-Woong Koo, Vikram M. Bhosle, John A. Frontiero, Nicholas P. T. Bateman, Timothy J. Miller +3 more | 2019-05-14 |
| 9865430 | Boron implanting using a co-gas | Bon-Woong Koo, Vikram M. Bhosle, John A. Frontiero, Nicholas P. T. Bateman, Timothy J. Miller +3 more | 2018-01-09 |
| 9840772 | Method of improving ion beam quality in a non-mass-analyzed ion implantation system | Bon-Woong Koo, John A. Frontiero, Timothy J. Miller, Svetlana B. Radovanov | 2017-12-12 |
| 9711316 | Method of cleaning an extraction electrode assembly using pulsed biasing | Peter F. Kurunczi | 2017-07-18 |
| 9677171 | Method of improving ion beam quality in a non-mass-analyzed ion implantation system | Bon-Woong Koo, John A. Frontiero, Timothy J. Miller, Svetlana B. Radovanov | 2017-06-13 |
| 9034743 | Method for implant productivity enhancement | Peter F. Kurunczi, Bon-Woong Koo, John A. Frontiero, William T. Levay, Timothy J. Miller +3 more | 2015-05-19 |
| 8907307 | Apparatus and method for maskless patterned implantation | Ludovic Godet, Timothy J. Miller | 2014-12-09 |
| 8698107 | Technique and apparatus for monitoring ion mass, energy, and angle in processing systems | Ludovic Godet, Bon-Woong Koo, Anthony Renau | 2014-04-15 |
| 8698109 | Method and system for controlling critical dimension and roughness in resist features | Ludovic Godet, Joseph C. Olson, Patrick M. Martin | 2014-04-15 |
| 8669538 | Method of improving ion beam quality in an implant system | Bon-Woong Koo, Peter F. Kurunczi, Timothy J. Miller, Svetlana B. Radovanov | 2014-03-11 |
| 8623171 | Plasma processing apparatus | Ludovic Godet, Timothy J. Miller, Bernard G. Lindsay | 2014-01-07 |
| 8461554 | Apparatus and method for charge neutralization during processing of a workpiece | Peter F. Kurunczi, Daniel Distaso, Timothy J. Miller | 2013-06-11 |
| 8354655 | Method and system for controlling critical dimension and roughness in resist features | Ludovic Godet, Joseph C. Olson, Patrick M. Martin | 2013-01-15 |