Issued Patents All Time
Showing 1–25 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249488 | Plasma shaper to control ion flux distribution of plasma source | Alexandre Likhanskii, Alan V. Hayes | 2025-03-11 |
| 12191156 | Ribbon beam plasma enhanced chemical vapor deposition system for anisotropic deposition of thin films | John Hautala, Tristan Y. Ma | 2025-01-07 |
| 12154753 | Device to control uniformity of extracted ion beam | Jay T. Scheuer, Graham Wright, Alexandre Likhanskii | 2024-11-26 |
| 12106936 | Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions | Morgan Evans, Joseph C. Olson, Christopher A. Rowland, James P. Buonodono | 2024-10-01 |
| 11996266 | Apparatus and techniques for substrate processing using independent ion source and radical source | Anthony Renau, Joseph C. Olson | 2024-05-28 |
| 11967489 | Apparatus and techniques for angled etching using multielectrode extraction source | Morgan Evans, Joseph C. Olson | 2024-04-23 |
| 11948781 | Apparatus and system including high angle extraction optics | Christopher Campbell, Costel Biloiu, Jay Wallace, Kevin M. Daniels, Kevin T. Ryan +3 more | 2024-04-02 |
| 11862433 | System and methods using an inline surface engineering source | Christopher R. Hatem, Christopher A. Rowland, Joseph C. Olson, Anthony Renau | 2024-01-02 |
| 11810746 | Variable thickness ion source extraction plate | Alexandre Likhanskii, Alexander S. Perel, Jay T. Scheuer, Bon-Woong Koo, Robert C. Lindberg +1 more | 2023-11-07 |
| 11715621 | Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions | Morgan Evans, Joseph C. Olson, Christopher A. Rowland, James P. Buonodono | 2023-08-01 |
| 11662524 | Forming variable depth structures with laser ablation | Joseph C. Olson, Morgan Evans, Rutger Meyer Timmerman Thijssen | 2023-05-30 |
| 11587778 | Electrodynamic mass analysis with RF biased ion source | Alexandre Likhanskii, Joseph C. Olson, Frank Sinclair | 2023-02-21 |
| 11495434 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Ryan Downey, Jay T. Scheuer, Alexandre Likhanskii +1 more | 2022-11-08 |
| 11388810 | System, apparatus and method for multi-frequency resonator operation in linear accelerator | David Blahnik, Frank Sinclair | 2022-07-12 |
| 11195703 | Apparatus and techniques for angled etching using multielectrode extraction source | Morgan Evans, Joseph C. Olson | 2021-12-07 |
| 11069511 | System and methods using an inline surface engineering source | Christopher R. Hatem, Christopher A. Rowland, Joseph C. Olson, Anthony Renau | 2021-07-20 |
| 11037758 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Ryan Downey, Jay T. Scheuer, Alexandre Likhanskii +1 more | 2021-06-15 |
| 10522330 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Ryan Downey, Jay T. Scheuer, Alexandre Likhanskii +1 more | 2019-12-31 |
| 10410844 | RF clean system for electrostatic elements | Kevin Anglin, Brant S. Binns, Jay T. Scheuer, Eric D. Hermanson, Alexandre Likhanskii | 2019-09-10 |
| 10290466 | Boron implanting using a co-gas | Bon-Woong Koo, Vikram M. Bhosle, John A. Frontiero, Nicholas P. T. Bateman, Timothy J. Miller +3 more | 2019-05-14 |
| 10224181 | Radio frequency extraction system for charge neutralized ion beam | Costel Biloiu, Piotr Lubicki, Tyler Rockwell, Christopher Campbell, Vikram Singh +3 more | 2019-03-05 |
| 10192727 | Electrodynamic mass analysis | Frank Sinclair, Joseph C. Olson, Costel Biloiu, Alexandre Likhanskii | 2019-01-29 |
| 9865430 | Boron implanting using a co-gas | Bon-Woong Koo, Vikram M. Bhosle, John A. Frontiero, Nicholas P. T. Bateman, Timothy J. Miller +3 more | 2018-01-09 |
| 9711316 | Method of cleaning an extraction electrode assembly using pulsed biasing | Christopher J. Leavitt | 2017-07-18 |
| 9536712 | Apparatus and method for mass analyzed ion beam | W. Davis Lee, Svetlana B. Radovanov | 2017-01-03 |