Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11862433 | System and methods using an inline surface engineering source | Peter F. Kurunczi, Christopher A. Rowland, Joseph C. Olson, Anthony Renau | 2024-01-02 |
| 11721530 | System for controlling radicals using a radical filter | — | 2023-08-08 |
| 11631588 | Method and apparatus for non line-of-sight doping | Piero Sferlazzo, Roger B. Fish, Dale K. Stone | 2023-04-18 |
| 11315790 | Enhanced substrate amorphization using intermittent ion exposure | Supakit Charnvanichborikarn | 2022-04-26 |
| 11069511 | System and methods using an inline surface engineering source | Peter F. Kurunczi, Christopher A. Rowland, Joseph C. Olson, Anthony Renau | 2021-07-20 |
| 10879055 | Techniques, system and apparatus for selective deposition of a layer using angled ions | Kevin Anglin | 2020-12-29 |
| 10541137 | Method and apparatus for non line-of-sight doping | Piero Sferlazzo, Roger B. Fish, Dale K. Stone | 2020-01-21 |
| 10411096 | Encapsulated nanostructures and devices containing encapsulated nanostructures | Kevin S. Jones, William M. Brewer | 2019-09-10 |
| 9985101 | Encapsulated nanostructures and method for fabricating | Kevin S. Jones, William M. Brewer | 2018-05-29 |
| 9953835 | Damage free enhancement of dopant diffusion into a substrate | Christopher A. Rowland | 2018-04-24 |
| 9589802 | Damage free enhancement of dopant diffusion into a substrate | Christopher A. Rowland | 2017-03-07 |
| 9576819 | Techniques for increased dopant activation in compound semiconductors | Benjamin Colombeau, Kevin S. Jones, Aaron Lind | 2017-02-21 |
| 9553174 | Conversion process utilized for manufacturing advanced 3D features for semiconductor device applications | Ludovic Godet, Matthew D. Scotney-Castle, Martin A. Hilkene | 2017-01-24 |
| 9520360 | Angled ion beam processing of heterogeneous structure | Anthony Renau | 2016-12-13 |
| 9425027 | Methods of affecting material properties and applications therefor | Ludovic Godet, Deepak A. Ramappa, Xianfeng Lu, Anthony Renau, Patrick M. Martin | 2016-08-23 |
| 9337040 | Angled ion beam processing of heterogeneous structure | Anthony Renau | 2016-05-10 |
| 9240350 | Techniques for forming 3D structures | Ludovic Godet, George D. Papasouliotis | 2016-01-19 |
| 9236257 | Techniques to mitigate straggle damage to sensitive structures | Anthony Renau, John Hautala, Ludovic Godet | 2016-01-12 |
| 9062367 | Plasma processing of workpieces to form a coating | Ludovic Godet, Louis Steen, Deepak A. Ramappa | 2015-06-23 |
| 9024273 | Method to generate molecular ions from ions with a smaller atomic mass | Ludovic Godet, Svetlana B. Radovanov | 2015-05-05 |
| 8969181 | Method for epitaxial layer overgrowth | Ludovic Godet, Morgan Evans | 2015-03-03 |
| 8742373 | Method of ionization | Svetlana B. Radovanov, Ludovic Godet | 2014-06-03 |
| 8697549 | Deposition of porous films for thermoelectric applications | Xianfeng Lu, Ludovic Godet, John Hautala | 2014-04-15 |
| 8465909 | Self-aligned masking for solar cell manufacture | Nicholas P. T. Bateman, Helen L. Maynard, Benjamin B. Riordon, Deepak A. Ramappa | 2013-06-18 |
| 8460569 | Method and system for post-etch treatment of patterned substrate features | Ludovic Godet, Patrick M. Martin, Timothy J. Miller | 2013-06-11 |