Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11631588 | Method and apparatus for non line-of-sight doping | Christopher R. Hatem, Roger B. Fish, Dale K. Stone | 2023-04-18 |
| 10541137 | Method and apparatus for non line-of-sight doping | Christopher R. Hatem, Roger B. Fish, Dale K. Stone | 2020-01-21 |
| 10004133 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Costel Biloiu, Glen Gilchrist, Vikram Singh, Christopher Campbell +3 more | 2018-06-19 |
| 9869021 | Showerhead apparatus for a linear batch chemical vapor deposition system | Dennis R. Stucky, Paul Thomas Fabiano, Darren M. Simonelli, Matthew C. Farrell, Robert P. Couilliard | 2018-01-16 |
| 9706634 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Costel Biloiu, Glen F. R. Gilchrist, Vikram Singh, Christopher Campbell +3 more | 2017-07-11 |
| 9206500 | Method and apparatus for surface processing of a substrate using an energetic particle beam | Boris L. Druz, Roger P. Fremgen, Alan V. Hayes, Viktor Kanarov, Robert Krause +1 more | 2015-12-08 |
| 9169562 | Parallel batch chemical vapor deposition system | Darren M. Simonelli | 2015-10-27 |
| 8986451 | Linear batch chemical vapor deposition system | — | 2015-03-24 |
| 8865259 | Method and system for inline chemical vapor deposition | Thomas Michael Lampros | 2014-10-21 |
| 8225527 | Cooling apparatus for a web deposition system | Donald N. Polner, Darren M. Simonelli | 2012-07-24 |
| 8157976 | Apparatus for cathodic vacuum-arc coating deposition | Boris L. Druz, Ivan I. Aksenov, Olexandr A. Luchaninov, Volodymyr Evgenievich Strelnytskiy, Volodymyr V. Vasylyev +1 more | 2012-04-17 |
| 8092599 | Movable injectors in rotating disc gas reactors | Alexander I. Gurary, Eric A. Armour, William E. Quinn, Steve Ting | 2012-01-10 |
| 6972055 | Continuous flow deposition system | — | 2005-12-06 |
| 6821912 | Substrate processing pallet and related substrate processing method and machine | Martin Klein, David Felsenthal | 2004-11-23 |
| 6718076 | Acousto-optic tunable filter with segmented acousto-optic interaction region | Kenneth Bures, Dogan Gunes, Chunghsin Lee, Paul Maki | 2004-04-06 |
| 6682288 | Substrate processing pallet and related substrate processing method and machine | Martin Klein, David Felsenthal | 2004-01-27 |
| 6669824 | Dual-scan thin film processing system | Chunghsin Lee | 2003-12-30 |
| 6530733 | Substrate processing pallet and related substrate processing method and machine | Martin Klein, David Felsenthal | 2003-03-11 |
| 6495010 | Differentially-pumped material processing system | — | 2002-12-17 |
| 6328858 | Multi-layer sputter deposition apparatus | David Felsenthal, Chunghsin Lee | 2001-12-11 |
| 6217272 | In-line sputter deposition system | David Felsenthal, Chunghsin Lee | 2001-04-17 |
| 6203406 | Aerosol surface processing | Peter Rose, Robert G. van der Heide | 2001-03-20 |
| 5967156 | Processing a surface | Peter Rose | 1999-10-19 |
| 5931721 | Aerosol surface processing | Peter Rose, Robert G. van der Heide | 1999-08-03 |
| 5811823 | Control mechanisms for dosimetry control in ion implantation systems | Julian G. Blake, Peter Rose, Adam Brailove | 1998-09-22 |