Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380517 | System and method for spatially resolved optical metrology of an ion beam | Gang Shu, Shurong Liang | 2022-07-05 |
| 10730082 | Apparatus and method for differential in situ cleaning | Costel Biloiu, Shurong Liang, Christopher Campbell, Vikram Singh | 2020-08-04 |
| 10633743 | System and method for controllable non-volatile metal removal | Tsung-Liang Chen, Benjamin Schmiege, Jeffrey W. Anthis | 2020-04-28 |
| 10600616 | Apparatus and techniques to treat substrates using directional plasma and point of use chemistry | Shurong Liang, Costel Biloiu, Vikram Singh, Christopher Campbell, Richard J. Hertel +1 more | 2020-03-24 |
| 10535522 | Angular control of ion beam for vertical surface treatment | Gang Shu, Shurong Liang | 2020-01-14 |
| 10193066 | Apparatus and techniques for anisotropic substrate etching | Raees Pervaiz, Kenneth L. Starks, Shurong Liang, Tyler Rockwell | 2019-01-29 |
| 10141161 | Angle control for radicals and reactive neutral ion beams | Shurong Liang | 2018-11-27 |
| 10062548 | Gas injection system for ion beam device | Jay Wallace, Ernest E. Allen, Richard J. Hertel, Kevin M. Daniels | 2018-08-28 |
| 10000853 | System and method for controllable non-volatile metal removal | Tsung-Liang Chen, Benjamin Schmiege, Jeffrey W. Anthis | 2018-06-19 |
| 10004133 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Costel Biloiu, Vikram Singh, Christopher Campbell, Richard J. Hertel +3 more | 2018-06-19 |
| 9611552 | System and method for controllable non-volatile metal removal | Tsung-Liang Chen, Benjamin Schmiege, Jeffrey W. Anthis | 2017-04-04 |