KS

Kenneth L. Starks

VA Varian Semiconductor Equipment Associates: 3 patents #187 of 513Top 40%
🗺 Massachusetts: #33,482 of 88,656 inventorsTop 40%
Overall (All Time): #1,462,423 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
10262833 Temperature controlled ion source Scott C. Holden, Bon-Woong Koo, Brant S. Binns, Richard M. White, Eric R. Cobb 2019-04-16
10193066 Apparatus and techniques for anisotropic substrate etching Glen Gilchrist, Raees Pervaiz, Shurong Liang, Tyler Rockwell 2019-01-29
9859098 Temperature controlled ion source Scott C. Holden, Bon-Woong Koo, Brant S. Binns, Richard M. White, Eric R. Cobb 2018-01-02