SL

Shurong Liang

VA Varian Semiconductor Equipment Associates: 12 patents #65 of 513Top 15%
Applied Materials: 8 patents #1,541 of 7,310Top 25%
Globalfoundries: 4 patents #817 of 4,424Top 20%
📍 Lynnfield, MA: #15 of 205 inventorsTop 8%
🗺 Massachusetts: #4,370 of 88,656 inventorsTop 5%
Overall (All Time): #169,190 of 4,157,543Top 5%
24
Patents All Time

Issued Patents All Time

Showing 1–24 of 24 patents

Patent #TitleCo-InventorsDate
12387942 Modifying patterned features using a directional etch Tassie Andersen 2025-08-12
11984318 Directional modification of patterning structure to enhance pattern elongation process margin Alexander C. Kontos, Il-Woong Koo 2024-05-14
11854818 Angled etch for surface smoothing Tassie Andersen 2023-12-26
11842923 Methods for forming elongated contact hole ends Glen F. R. Gilchrist 2023-12-12
11380517 System and method for spatially resolved optical metrology of an ion beam Gang Shu, Glen Gilchrist 2022-07-05
11335590 Methods for forming elongated contact hole ends Glen F. R. Gilchrist 2022-05-17
10840132 Methods for forming elongated contact hole ends Glen F. R. Gilchrist 2020-11-17
10730082 Apparatus and method for differential in situ cleaning Glen Gilchrist, Costel Biloiu, Christopher Campbell, Vikram Singh 2020-08-04
10699871 System and method for spatially resolved optical metrology of an ion beam Gang Shu, Glen F. R. Gilchrist 2020-06-30
10600616 Apparatus and techniques to treat substrates using directional plasma and point of use chemistry Costel Biloiu, Glen Gilchrist, Vikram Singh, Christopher Campbell, Richard J. Hertel +1 more 2020-03-24
10535522 Angular control of ion beam for vertical surface treatment Gang Shu, Glen Gilchrist 2020-01-14
10312432 Magnetic memory device and techniques for forming Tsung-Liang Chen, Alexander C. Kontos 2019-06-04
10193066 Apparatus and techniques for anisotropic substrate etching Glen Gilchrist, Raees Pervaiz, Kenneth L. Starks, Tyler Rockwell 2019-01-29
10141161 Angle control for radicals and reactive neutral ion beams Glen Gilchrist 2018-11-27
10128082 Apparatus and techniques to treat substrates using directional plasma and point of use chemistry Costel Biloiu, Glen F. R. Gilchrist, Vikram Singh, Christopher Campbell, Richard J. Hertel +1 more 2018-11-13
10113229 Techniques for controlling ion/neutral ratio of a plasma source Tsung-Liang Chen, John Hautala, Joseph C. Olson 2018-10-30
10004133 Apparatus and techniques to treat substrates using directional plasma and reactive gas Costel Biloiu, Glen Gilchrist, Vikram Singh, Christopher Campbell, Richard J. Hertel +3 more 2018-06-19
9997351 Apparatus and techniques for filling a cavity using angled ion beam Tsung-Liang Chen, John Hautala 2018-06-12
9865433 Gas injection system for ion beam device Jay Wallace, Ernest E. Allen, Richard J. Hertel, Alexander C. Kontos, Jeffrey E. Krampert +1 more 2018-01-09
9706634 Apparatus and techniques to treat substrates using directional plasma and reactive gas Costel Biloiu, Glen F. R. Gilchrist, Vikram Singh, Christopher Campbell, Richard J. Hertel +3 more 2017-07-11
9299775 Methods for the production of integrated circuits comprising epitaxially grown replacement structures Steven Bentley, Kejia Wang, Sylvie Mignot 2016-03-29
9275861 Methods of forming group III-V semiconductor materials on group IV substrates and the resulting substrate structures Li Yang, Kejia Wang, Ashish Baraskar, Bin Yang 2016-03-01
9224605 Forming alternative material fins with reduced defect density by performing an implantation/anneal defect generation process Yi Qi, Ajey Poovannummoottil Jacob 2015-12-29
9123627 Methods of forming alternative material fins with reduced defect density for a FinFET semiconductor device Yi Qi, Ajey Poovannummoottil Jacob 2015-09-01