Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11881378 | Angle control for neutral reactive species generated in a plasma | Yufeng Qiu | 2024-01-23 |
| 11842923 | Methods for forming elongated contact hole ends | Shurong Liang | 2023-12-12 |
| 11361968 | Atomic layer deposition using a substrate scanning system | — | 2022-06-14 |
| 11335590 | Methods for forming elongated contact hole ends | Shurong Liang | 2022-05-17 |
| 10840132 | Methods for forming elongated contact hole ends | Shurong Liang | 2020-11-17 |
| 10699871 | System and method for spatially resolved optical metrology of an ion beam | Gang Shu, Shurong Liang | 2020-06-30 |
| 10128082 | Apparatus and techniques to treat substrates using directional plasma and point of use chemistry | Shurong Liang, Costel Biloiu, Vikram Singh, Christopher Campbell, Richard J. Hertel +1 more | 2018-11-13 |
| 9740104 | Plasma dry strip pretreatment to enhance ion implanted resist removal | Ivan L. Berry, III | 2017-08-22 |
| 9706634 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Costel Biloiu, Vikram Singh, Christopher Campbell, Richard J. Hertel +3 more | 2017-07-11 |
| 7289863 | System and method for electronic diagnostics of a process vacuum environment | Joseph Arruda, Kathleen D. Keay | 2007-10-30 |