Issued Patents All Time
Showing 1–25 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283463 | Systems and methods for multi-level pulsing in RF plasma tools | Ying Wu, Maolin Long, John Drewery | 2025-04-22 |
| 11905266 | Covalent organic framework and method of preparing the same | Hye Ryung Byon | 2024-02-20 |
| 10730082 | Apparatus and method for differential in situ cleaning | Glen Gilchrist, Costel Biloiu, Shurong Liang, Christopher Campbell | 2020-08-04 |
| 10600616 | Apparatus and techniques to treat substrates using directional plasma and point of use chemistry | Shurong Liang, Costel Biloiu, Glen Gilchrist, Christopher Campbell, Richard J. Hertel +1 more | 2020-03-24 |
| 10224181 | Radio frequency extraction system for charge neutralized ion beam | Costel Biloiu, Piotr Lubicki, Tyler Rockwell, Christopher Campbell, Kevin M. Daniels +3 more | 2019-03-05 |
| 10209405 | Mobile electronic device cover plate comprising a thin sapphire layer | Thomas Gutierrez | 2019-02-19 |
| 10128082 | Apparatus and techniques to treat substrates using directional plasma and point of use chemistry | Shurong Liang, Costel Biloiu, Glen F. R. Gilchrist, Christopher Campbell, Richard J. Hertel +1 more | 2018-11-13 |
| 10004133 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Costel Biloiu, Glen Gilchrist, Christopher Campbell, Richard J. Hertel +3 more | 2018-06-19 |
| 9767987 | Method and system for modifying substrate relief features using ion implantation | Ludovic Godet, Patrick M. Martin, Timothy J. Miller | 2017-09-19 |
| 9706634 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Costel Biloiu, Glen F. R. Gilchrist, Christopher Campbell, Richard J. Hertel +3 more | 2017-07-11 |
| 9589769 | Apparatus and method for efficient materials use during substrate processing | Vijayakumar C. Venugopal, Richard J. Hertel, Ernest E. Allen | 2017-03-07 |
| 9514912 | Control of ion angular distribution of ion beams with hidden deflection electrode | Costel Biloiu, Peter F. Kurunczi, Tyler Rockwell, Christopher Campbell, Svetlana B. Radovanov | 2016-12-06 |
| 9123509 | Techniques for plasma processing a substrate | George D. Papasouliotis, Kamal Hadidi, Helen L. Maynard, Ludovic Godet, Timothy J. Miller +1 more | 2015-09-01 |
| 8937004 | Apparatus and method for controllably implanting workpieces | Anthony Renau, Ludovic Godet, Timothy J. Miller, Joseph C. Olson, James P. Buonodono +4 more | 2015-01-20 |
| 8926850 | Plasma processing with enhanced charge neutralization and process control | Timothy J. Miller, Bernard G. Lindsay | 2015-01-06 |
| 8877654 | Pulsed plasma to affect conformal processing | Helen L. Maynard, Svetlana B. Radovanov, Harold Persing | 2014-11-04 |
| 8858816 | Enhanced etch and deposition profile control using plasma sheath engineering | Ludovic Godet, Timothy J. Miller, George D. Papasouliotis | 2014-10-14 |
| 8778603 | Method and system for modifying substrate relief features using ion implantation | Ludovic Godet, Patrick M. Martin, Timothy J. Miller | 2014-07-15 |
| 8679960 | Technique for processing a substrate having a non-planar surface | George D. Papasouliotis, Heyun Yin, Helen L. Maynard, Ludovic Godet | 2014-03-25 |
| 8664561 | System and method for selectively controlling ion composition of ion sources | Kamal Hadidi, Rajesh Dorai, Bernard G. Lindsay, George D. Papasouliotis | 2014-03-04 |
| 8664098 | Plasma processing apparatus | Ludovic Godet, Timothy J. Miller, Svetlana B. Radovanov, Anthony Renau | 2014-03-04 |
| 8603591 | Enhanced etch and deposition profile control using plasma sheath engineering | Ludovic Godet, Timothy J. Miller, George D. Papasouliotis | 2013-12-10 |
| 8507372 | Method for processing a substrate having a non-planar substrate surface | George D. Papasouliotis, Heyun Yin | 2013-08-13 |
| 8461030 | Apparatus and method for controllably implanting workpieces | Anthony Renau, Ludovic Godet, Timothy J. Miller, Joseph C. Olson, James P. Buonodono +4 more | 2013-06-11 |
| 8460748 | Patterned magnetic bit data storage media and a method for manufacturing the same | Frank Sinclair | 2013-06-11 |