Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106936 | Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions | Peter F. Kurunczi, Morgan Evans, Joseph C. Olson, Christopher A. Rowland | 2024-10-01 |
| 11715621 | Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions | Peter F. Kurunczi, Morgan Evans, Joseph C. Olson, Christopher A. Rowland | 2023-08-01 |
| 11145496 | System for using O-rings to apply holding forces | Daniel McGillicudy | 2021-10-12 |
| 11127556 | Extraction apparatus and system for high throughput ion beam processing | Costel Biloiu, Jon Ballou | 2021-09-21 |
| 10468226 | Extraction apparatus and system for high throughput ion beam processing | Costel Biloiu, Jon Ballou | 2019-11-05 |
| 10062544 | Apparatus and method for minimizing thermal distortion in electrodes used with ion sources | — | 2018-08-28 |
| 9916966 | Apparatus and method for minimizing thermal distortion in electrodes used with ion sources | — | 2018-03-13 |
| 9520312 | System and method for moving workpieces between multiple vacuum environments | — | 2016-12-13 |
| 9484183 | Linkage conduit for vacuum chamber applications | Eric D. Hermanson, Robert J. Mitchell, Steven M. Anella, Jeffrey Blahnik, William T. Weaver +1 more | 2016-11-01 |
| 9437392 | High-throughput ion implanter | William T. Weaver, Charles T. Carlson, Joseph C. Olson, Paul Sullivan | 2016-09-06 |
| 9337076 | Workpiece support structure with four degree of freedom air bearing for high vacuum systems | Michael Esposito | 2016-05-10 |
| 9287085 | Processing apparatus and method of treating a substrate | Ernest E. Allen, Jon Ballou, Kevin M. Daniels, Joseph P. Dzengeleski | 2016-03-15 |
| 9190248 | Dynamic electrode plasma system | — | 2015-11-17 |
| 8937004 | Apparatus and method for controllably implanting workpieces | Anthony Renau, Ludovic Godet, Timothy J. Miller, Joseph C. Olson, Vikram Singh +4 more | 2015-01-20 |
| 8816299 | Workpiece support structure with four degree of freedom air bearing for high vacuum systems | Michael Esposito | 2014-08-26 |
| 8698108 | Ion beam measurement system and method | Joseph P. Dzengeleski, Eric D. Hermanson, Robert J. Mitchell, Tyler Rockwell, James W. Wilkinson +1 more | 2014-04-15 |
| 8461030 | Apparatus and method for controllably implanting workpieces | Anthony Renau, Ludovic Godet, Timothy J. Miller, Joseph C. Olson, Vikram Singh +4 more | 2013-06-11 |
| 7812325 | Implanting with improved uniformity and angle control on tilted wafers | Paul J. Murphy, Joseph C. Olson, Anthony Renau | 2010-10-12 |
| 7453069 | Bushing unit with integrated conductor in ion accelerating device and related method | Edward W. Bell, Piotr Lubicki | 2008-11-18 |