| 12165852 |
Cover ring to mitigate carbon contamination in plasma doping chamber |
Vikram M. Bhosle, Timothy J. Miller, Christopher J. Leavitt, Jordan B. Tye |
2024-12-10 |
| 11810754 |
System using pixelated faraday sensor |
Nevin H. Clay, Antonella Cucchetti, Philip Layne, Sudhakar Mahalingam, Michael Simmons |
2023-11-07 |
| 11562885 |
Particle yield via beam-line pressure control |
Thomas Stacy, Jay T. Scheuer, Bon-Woong Koo, Tseh-Jen Hsieh |
2023-01-24 |
| 11437215 |
Electrostatic filter providing reduced particle generation |
Alexandre Likhanskii, Antonella Cucchetti, Frank Sinclair, Jay T. Scheuer, Robert C. Lindberg |
2022-09-06 |
| 11222768 |
Foam in ion implantation system |
James Alan Pixley, Philip Layne, Lyudmila Stone, Thomas Stacy |
2022-01-11 |
| 11114277 |
Dual cathode ion source |
Bon-Woong Koo, Jun Lu, Frank Sinclair, Joseph E. Pierro, Michael D. Johnson +2 more |
2021-09-07 |
| 11049691 |
Ion beam quality control using a movable mass resolving device |
Bon-Woong Koo, Robert C. Lindberg, Frank Sinclair, Antonella Cucchetti, Randy Martin +3 more |
2021-06-29 |
| 11011343 |
High-current ion implanter and method for controlling ion beam using high-current ion implanter |
Alexandre Likhanskii, Shengwu Chang, Frank Sinclair, Antonella Cucchetti, Christopher Campbell |
2021-05-18 |
| 10886098 |
Electrostatic filter and ion implanter having asymmetric electrostatic configuration |
Alexandre Likhanskii, Frank Sinclair, Shengwu Chang, Nevin H. Clay |
2021-01-05 |
| 10867772 |
Electrostatic element having grooved exterior surface |
Philip Layne, James Alan Pixley |
2020-12-15 |
| 10741361 |
Dual cathode ion source |
Bon-Woong Koo, Jun Lu, Frank Sinclair, Joseph E. Pierro, Michael D. Johnson +2 more |
2020-08-11 |
| 10643823 |
Foam in ion implantation system |
James Alan Pixley, Philip Layne, Lyudmila Stone, Thomas Stacy |
2020-05-05 |
| 10504682 |
Conductive beam optic containing internal heating element |
Shengwu Chang, Frank Sinclair, Alexandre Likhanskii, Christopher Campbell, Robert C. Lindberg |
2019-12-10 |
| 10446372 |
Dual cathode ion source |
Bon-Woong Koo, Jun Lu, Frank Sinclair, Joseph E. Pierro, Michael D. Johnson +2 more |
2019-10-15 |
| 10410844 |
RF clean system for electrostatic elements |
Kevin Anglin, Brant S. Binns, Peter F. Kurunczi, Jay T. Scheuer, Alexandre Likhanskii |
2019-09-10 |
| 10157763 |
High throughput substrate handling endstation and sequence |
Robert J. Mitchell, Benjamin B. Riordon |
2018-12-18 |
| 10119529 |
Cryopump arrangement for improved pump speed |
Steven C. Borichevsky |
2018-11-06 |
| 9978554 |
Dual cathode ion source |
Bon-Woong Koo, Jun Lu, Frank Sinclair, Joseph E. Pierro, Michael D. Johnson +2 more |
2018-05-22 |
| 9613778 |
Connector for process chamber electrostatic elements |
Mayur Jagtap, James Alan Pixley |
2017-04-04 |
| 9484183 |
Linkage conduit for vacuum chamber applications |
Robert J. Mitchell, Steven M. Anella, Jeffrey Blahnik, William T. Weaver, Michael Paul Rohrer +1 more |
2016-11-01 |
| 9008740 |
Techniques for protecting a superconducting (SC) tape |
Gregory Citver, Semaan Fersan, Kasegn D. Tekletsadik, Scott W. Nickerson, Charles L. Stanley |
2015-04-14 |
| 8698108 |
Ion beam measurement system and method |
Joseph P. Dzengeleski, Robert J. Mitchell, Tyler Rockwell, James W. Wilkinson, James P. Buonodono +1 more |
2014-04-15 |
| 8481960 |
Deceleration lens |
Svetlana B. Radovanov, Jason M. Schaller, Richard M. White, Kevin Verrier, James W. Blanchette +2 more |
2013-07-09 |
| 8455760 |
Interfacing two insulation parts in high voltage environment |
Russell J. Low, Kasegn D. Tekletsadik, Anthony Renau, Piotr Lubicki, D. Jeffrey Lischer +2 more |
2013-06-04 |
| 8143604 |
Insulator system for a terminal structure of an ion implantation system |
Russell J. Low, Piortr R. Lubicki, D. Jeffrey Lischer, Steve Krause, Joseph C. Olson |
2012-03-27 |
