Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11473978 | Enhanced substrate temperature measurement apparatus, system and method | Dawei Sun, D. Jeffrey Lischer, Qin Chen, Dale K. Stone, Steven M. Anella +2 more | 2022-10-18 |
| 11222768 | Foam in ion implantation system | James Alan Pixley, Eric D. Hermanson, Philip Layne, Thomas Stacy | 2022-01-11 |
| 10643823 | Foam in ion implantation system | James Alan Pixley, Eric D. Hermanson, Philip Layne, Thomas Stacy | 2020-05-05 |
| 10385454 | Diffusion resistant electrostatic clamp | Dale K. Stone, Richard A. Cooke, I-Kuan Lin, Julian G. Blake | 2019-08-20 |
| 9692325 | High conductivity electrostatic chuck | David E. Suuronen, Julian G. Blake, Dale K. Stone, Richard A. Cooke, Steven Donnell +1 more | 2017-06-27 |
| 9644269 | Diffusion resistant electrostatic clamp | Dale K. Stone, Richard A. Cooke, I-Kuan Lin, Julian G. Blake | 2017-05-09 |
| 9633875 | Apparatus for improving temperature uniformity of a workpiece | Dawei Sun, D. Jeffrey Lischer, Steven M. Anella, Dale K. Stone | 2017-04-25 |
| 9082804 | Triboelectric charge controlled electrostatic clamp | Julian G. Blake, Dale K. Stone, David E. Suuronen, Shigeo Oshiro | 2015-07-14 |
| 9025305 | High surface resistivity electrostatic chuck | Richard A. Cooke, Dale K. Stone, Julian G. Blake, David E. Suuronen | 2015-05-05 |
| 8531814 | Removal of charge between a substrate and an electrostatic clamp | Dale K. Stone, Klaus Petry, David E. Suuronen, Julian G. Blake | 2013-09-10 |
| 8268081 | Platen cleaning method | David E. Suuronen, Frederick B. Ammon, David Burgdorf | 2012-09-18 |
| 7715170 | Electrostatic chuck with separated electrodes | Julian G. Blake, Dale K. Stone, David E. Suuronen | 2010-05-11 |
| 7381969 | Load lock control | Tariq Fasheh, James C. Carroll, Klaus Petry, Dale K. Stone, Dave Wiederspahn | 2008-06-03 |
| 7205556 | Bellows liner for an ion beam implanter | Scott Barusso, Dale K. Stone, Alexander S. Perel | 2007-04-17 |
| 7078712 | In-situ monitoring on an ion implanter | Alexander S. Perel, William K. Loizides, Victor M. Benveniste | 2006-07-18 |