Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10658207 | Platen for reducing particle contamination on a substrate and a method thereof | David E. Suuronen, Dale K. Stone, Arthur P. Riaf, Edward D. MacIntosh | 2020-05-19 |
| 9953849 | Platen for reducing particle contamination on a substrate and a method thereof | David E. Suuronen, Dale K. Stone, Arthur P. Riaf, Edward D. MacIntosh | 2018-04-24 |
| 9082804 | Triboelectric charge controlled electrostatic clamp | Julian G. Blake, Dale K. Stone, Lyudmila Stone, David E. Suuronen | 2015-07-14 |
| 8681472 | Platen ground pin for connecting substrate to ground | David E. Suuronen, Dale K. Stone, Arthur P. Riaf, Edward D. MacIntosh | 2014-03-25 |