Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10658207 | Platen for reducing particle contamination on a substrate and a method thereof | David E. Suuronen, Dale K. Stone, Shigeo Oshiro, Arthur P. Riaf | 2020-05-19 |
| 9953849 | Platen for reducing particle contamination on a substrate and a method thereof | David E. Suuronen, Dale K. Stone, Shigeo Oshiro, Arthur P. Riaf | 2018-04-24 |
| 9218990 | Method and apparatus for holding a plurality of substrates for processing | John Robert Fairhurst, Jeffrey E. Krampert, Richard J. Hertel | 2015-12-22 |
| 8746666 | Media carrier | Richard J. Hertel, Julian G. Blake, Alexander C. Kontos, Frank Sinclair, Christopher A. Rowland +2 more | 2014-06-10 |
| 8681472 | Platen ground pin for connecting substrate to ground | David E. Suuronen, Dale K. Stone, Shigeo Oshiro, Arthur P. Riaf | 2014-03-25 |
| 7309997 | Monitor system and method for semiconductor processes | Svetlana B. Radovanov, Gary Ayers, Philip D. Corey | 2007-12-18 |
| 7279687 | Technique for implementing a variable aperture lens in an ion implanter | Gordon C. Angel, Svetlana B. Radovanov | 2007-10-09 |
| 7109499 | Apparatus and methods for two-dimensional ion beam profiling | Gordon C. Angel, Thomas A. Schaefer | 2006-09-19 |
| 4836733 | Wafer transfer system | Richard J. Hertel, Adrian Delforge, Eric L. Mears, Robert E. Jennings, Akhil Bhargava | 1989-06-06 |
| 4449885 | Wafer transfer system | Richard J. Hertel | 1984-05-22 |