Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7723707 | Techniques for plasma injection | Victor M. Benveniste, Bon-Woong Koo, Kourosh Saadatmand | 2010-05-25 |
| 7655922 | Techniques for confining electrons in an ion implanter | Donna L. Smatlak, Rajesh Dorai | 2010-02-02 |
| 7279687 | Technique for implementing a variable aperture lens in an ion implanter | Svetlana B. Radovanov, Edward D. MacIntosh | 2007-10-09 |
| 7250617 | Ion beam neutral detection | Anthony Renau, Joseph C. Olson, Eric D. Hermanson | 2007-07-31 |
| 7170067 | Ion beam measurement apparatus and method | Anthony Renau, Eric D. Hermanson, Joseph C. Olson | 2007-01-30 |
| 7109499 | Apparatus and methods for two-dimensional ion beam profiling | Edward D. MacIntosh, Thomas A. Schaefer | 2006-09-19 |
| 7005657 | Wafer-scanning ion implanter having fast beam deflection apparatus for beam glitch recovery | Russell J. Low | 2006-02-28 |