Issued Patents All Time
Showing 1–25 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049861 | Inductively coupled RF plasma source with magnetic confinement and Faraday shielding | Svetlana B. Radovanov, Costel Biloiu | 2018-08-14 |
| 9793087 | Techniques and apparatus for manipulating an ion beam | James S. Buff, Frank Sinclair | 2017-10-17 |
| 9297063 | Plasma potential modulated ion implantation system | Svetlana B. Radovanov, Bon-Woong Koo, Richard M. White, Kevin M. Daniels | 2016-03-29 |
| 9018829 | Excited gas injection for ion implant control | Bon-Woong Koo, Christopher A. Rowland, Craig R. Chaney, Frank Sinclair, Neil J. Bassom | 2015-04-28 |
| 8847496 | Inductively coupled plasma flood gun using an immersed low inductance RF coil and multicusp magnetic arrangement | Peter F. Kurunczi, Oliver V. Naumovski | 2014-09-30 |
| 8604443 | System and method for manipulating an ion beam | Frank Sinclair, Svetlana B. Radovanov, James S. Buff | 2013-12-10 |
| 8501624 | Excited gas injection for ion implant control | Bon-Woong Koo, Christopher A. Rowland, Craig R. Chaney, Frank Sinclair, Neil J. Bassom | 2013-08-06 |
| 8471476 | Inductively coupled plasma flood gun using an immersed low inductance FR coil and multicusp magnetic arrangement | Peter F. Kurunczi, Oliver V. Naumovski | 2013-06-25 |
| 8466431 | Techniques for improving extracted ion beam quality using high-transparency electrodes | James S. Buff, Svetlana B. Radovanov, Bon-Woong Koo, Wilhelm P. Platow, Frank Sinclair +7 more | 2013-06-18 |
| 8436318 | Apparatus for controlling the temperature of an RF ion source window | Frank Sinclair, Costel Biloiu, Bon-Woong Koo, Shardul S. Patel | 2013-05-07 |
| 8357912 | Techniques for providing a multimode ion source | Svetlana B. Radovanov, Bon-Woong Koo, Frank Sinclair | 2013-01-22 |
| 8263941 | Mass analysis magnet for a ribbon beam | James S. Buff, Frank Sinclair, Joseph C. Olson | 2012-09-11 |
| 8188448 | Temperature controlled ion source | Bon-Woong Koo, Shardul S. Patel, Frank Sinclair | 2012-05-29 |
| 8183542 | Temperature controlled ion source | Bon-Woong Koo, Shardul S. Patel, Frank Sinclair | 2012-05-22 |
| 8129695 | System and method for controlling deflection of a charged particle beam within a graded electrostatic lens | Peter L. Kellerman, Frank Sinclair, Jun Lu | 2012-03-06 |
| 7897945 | Hydrogen ion implanter using a broad beam source | Thomas Parrill | 2011-03-01 |
| 7888653 | Techniques for independently controlling deflection, deceleration and focus of an ion beam | Peter L. Kellerman, Svetlana B. Radovanov, Frank Sinclair | 2011-02-15 |
| 7820988 | Implant uniformity control | Antonella Cucchetti, Bon-Woong Koo | 2010-10-26 |
| 7807983 | Technique for reducing magnetic fields at an implant location | Kenneth H. Purser, James S. Buff | 2010-10-05 |
| 7748344 | Segmented resonant antenna for radio frequency inductively coupled plasmas | William F. DiVergilio, Peter L. Kellerman | 2010-07-06 |
| 7723707 | Techniques for plasma injection | Gordon C. Angel, Bon-Woong Koo, Kourosh Saadatmand | 2010-05-25 |
| 7723705 | Techniques for measuring ion beam emittance | — | 2010-05-25 |
| 7700925 | Techniques for providing a multimode ion source | Svetlana B. Radovanov, Bon-Woong Koo, Frank Sinclair | 2010-04-20 |
| 7675047 | Technique for shaping a ribbon-shaped ion beam | Svetlana B. Radovanov, Peter L. Kellerman, Robert C. Lindberg, Kenneth H. Purser, Tyler Rockwell +2 more | 2010-03-09 |
| 7619228 | Technique for improved ion beam transport | — | 2009-11-17 |