Issued Patents All Time
Showing 26–50 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7598505 | Multichannel ion gun | — | 2009-10-06 |
| 7598495 | Methods and systems for trapping ion beam particles and focusing an ion beam | Peter L. Kellerman, Alexander S. Perel, Brian S. Freer, Michael Graf | 2009-10-06 |
| 7579602 | Ion implantation with a collimator magnet and a neutral filter magnet | Christopher Campbell, Frank Sinclair | 2009-08-25 |
| 7550751 | Ion beam scanning control methods and systems for ion implantation uniformity | Edward C. Eisner, Bo H. Vanderberg | 2009-06-23 |
| 7421973 | System and method for performing SIMOX implants using an ion shower | Peter L. Kellerman, William F. DiVergili, Michael Patrick Bradley | 2008-09-09 |
| 7375355 | Ribbon beam ion implanter cluster tool | Joseph Ferrara, Patrick Splinter, Michael Graf | 2008-05-20 |
| 7267520 | Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights | Peter L. Kellerman, Kourosh Saadatmand, Mehran Asdigha, Douglas Brown | 2007-09-11 |
| 7151658 | High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer | Peter L. Kellerman, Michel Pharand, Dale K. Stone | 2006-12-19 |
| 7112809 | Electrostatic lens for ion beams | Robert D. Rathmell | 2006-09-26 |
| 7078707 | Ion beam scanning control methods and systems for ion implantation uniformity | Peter L. Kellerman, William F. DiVergilio | 2006-07-18 |
| 7078712 | In-situ monitoring on an ion implanter | Alexander S. Perel, Lyudmila Stone, William K. Loizides | 2006-07-18 |
| 7033443 | Gas-cooled clamp for RTP | Peter L. Kellerman, Frederick M. Carlson | 2006-04-25 |
| 7019314 | Systems and methods for ion beam focusing | Peter L. Kellerman | 2006-03-28 |
| 6956225 | Method and apparatus for selective pre-dispersion of extracted ion beams in ion implantation systems | — | 2005-10-18 |
| 6885014 | Symmetric beamline and methods for generating a mass-analyzed ribbon ion beam | — | 2005-04-26 |
| 6881966 | Hybrid magnetic/electrostatic deflector for ion implantation systems | Robert D. Rathmell, Yongzhang Huang | 2005-04-19 |
| 6879109 | Thin magnetron structures for plasma generation in ion implantation systems | William F. DiVergilio, Bo H. Vanderberg | 2005-04-12 |
| 6872953 | Two dimensional stationary beam profile and angular mapping | — | 2005-03-29 |
| 6835930 | High mass resolution magnet for ribbon beam ion implanters | Yongzhang Huang | 2004-12-28 |
| 6833710 | Probe assembly for detecting an ion in a plasma generated in an ion source | — | 2004-12-21 |
| 6774377 | Electrostatic parallelizing lens for ion beams | Robert D. Rathmell | 2004-08-10 |
| 6770888 | High mass resolution magnet for ribbon beam ion implanters | Yongzhang Huang | 2004-08-03 |
| 6759665 | Method and system for ion beam containment in an ion beam guide | William F. DiVergilio, John Zheng Ye | 2004-07-06 |
| 6703628 | Method and system for ion beam containment in an ion beam guide | John Zheng Ye, Michael Cristoforo | 2004-03-09 |
| 6677598 | Beam uniformity and angular distribution measurement system | — | 2004-01-13 |