| 8941968 |
Heated electrostatic chuck including mechanical clamp capability at high temperature |
Perry J. I. Justesen, Allan D. Weed, William Davis Lee, Ashwin M. Purohit, Gary Cook |
2015-01-27 |
| 8797706 |
Heated annulus chuck |
William Davis Lee, Gary Cook, Perry J. I. Justesen, Ashwin M. Purohit, Allan D. Weed |
2014-08-05 |
| 7982195 |
Controlled dose ion implantation |
Aditya Agarwal, David E. Hoglund |
2011-07-19 |
| 7615763 |
System for magnetic scanning and correction of an ion beam |
Bo H. Vanderberg, Edward C. Eisner |
2009-11-10 |
| 7361915 |
Beam current stabilization utilizing gas feed control loop |
Bo H. Vanderberg |
2008-04-22 |
| 7361914 |
Means to establish orientation of ion beam to wafer and correct angle errors |
Bo H. Vanderberg |
2008-04-22 |
| 7329882 |
Ion implantation beam angle calibration |
Dennis Elliott Kamenitsa |
2008-02-12 |
| 7112809 |
Electrostatic lens for ion beams |
Victor M. Benveniste |
2006-09-26 |
| 7102146 |
Dose cup located near bend in final energy filter of serial implanter for closed loop dose control |
— |
2006-09-05 |
| 7022984 |
Biased electrostatic deflector |
Bo H. Vanderberg, Youngzhang Huang |
2006-04-04 |
| 6989545 |
Device and method for measurement of beam angle and divergence |
Douglas Brown, Andrew M. Ray |
2006-01-24 |
| 6881966 |
Hybrid magnetic/electrostatic deflector for ion implantation systems |
Victor M. Benveniste, Yongzhang Huang |
2005-04-19 |
| 6777696 |
Deflecting acceleration/deceleration gap |
Bo H. Vanderberg, Yongzhang Huang |
2004-08-17 |
| 6774377 |
Electrostatic parallelizing lens for ion beams |
Victor M. Benveniste |
2004-08-10 |
| 6534775 |
Electrostatic trap for particles entrained in an ion beam |
Eric R. Harrington, Victor M. Benveniste, Michael Graf |
2003-03-18 |
| 6476399 |
System and method for removing contaminant particles relative to an ion beam |
Eric R. Harrington, Victor M. Benveniste, Michael Graf |
2002-11-05 |
| 4816693 |
Apparatus and method for uniform ion dose control |
— |
1989-03-28 |