Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8941968 | Heated electrostatic chuck including mechanical clamp capability at high temperature | Perry J. I. Justesen, Allan D. Weed, William Davis Lee, Ashwin M. Purohit, Gary Cook | 2015-01-27 |
| 8797706 | Heated annulus chuck | William Davis Lee, Gary Cook, Perry J. I. Justesen, Ashwin M. Purohit, Allan D. Weed | 2014-08-05 |
| 7982195 | Controlled dose ion implantation | Aditya Agarwal, David E. Hoglund | 2011-07-19 |
| 7615763 | System for magnetic scanning and correction of an ion beam | Bo H. Vanderberg, Edward C. Eisner | 2009-11-10 |
| 7361915 | Beam current stabilization utilizing gas feed control loop | Bo H. Vanderberg | 2008-04-22 |
| 7361914 | Means to establish orientation of ion beam to wafer and correct angle errors | Bo H. Vanderberg | 2008-04-22 |
| 7329882 | Ion implantation beam angle calibration | Dennis Elliott Kamenitsa | 2008-02-12 |
| 7112809 | Electrostatic lens for ion beams | Victor M. Benveniste | 2006-09-26 |
| 7102146 | Dose cup located near bend in final energy filter of serial implanter for closed loop dose control | — | 2006-09-05 |
| 7022984 | Biased electrostatic deflector | Bo H. Vanderberg, Youngzhang Huang | 2006-04-04 |
| 6989545 | Device and method for measurement of beam angle and divergence | Douglas Brown, Andrew M. Ray | 2006-01-24 |
| 6881966 | Hybrid magnetic/electrostatic deflector for ion implantation systems | Victor M. Benveniste, Yongzhang Huang | 2005-04-19 |
| 6777696 | Deflecting acceleration/deceleration gap | Bo H. Vanderberg, Yongzhang Huang | 2004-08-17 |
| 6774377 | Electrostatic parallelizing lens for ion beams | Victor M. Benveniste | 2004-08-10 |
| 6534775 | Electrostatic trap for particles entrained in an ion beam | Eric R. Harrington, Victor M. Benveniste, Michael Graf | 2003-03-18 |
| 6476399 | System and method for removing contaminant particles relative to an ion beam | Eric R. Harrington, Victor M. Benveniste, Michael Graf | 2002-11-05 |
| 4816693 | Apparatus and method for uniform ion dose control | — | 1989-03-28 |