Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10774419 | Implantation using solid aluminum iodide (ALI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products | Richard J. Rzeszut, Fernando M. Silva, Jason R. Beringer, Xiangyang Wu | 2020-09-15 |
| 10087520 | Implantation using solid aluminum iodide (AlI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products | Richard J. Rzeszut, Fernando M. Silva, Neil K. Colvin | 2018-10-02 |
| 7329882 | Ion implantation beam angle calibration | Robert D. Rathmell | 2008-02-12 |