Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11276543 | Hydrogen generator for an ion implanter | Neil K. Colvin, Tseh-Jen Hsieh, Wendy Colby | 2022-03-15 |
| 10847339 | Hydrogen generator for an ion implanter | Neil K. Colvin, Tseh-Jen Hsieh, Wendy Colby | 2020-11-24 |
| 10774419 | Implantation using solid aluminum iodide (ALI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products | Dennis Elliott Kamenitsa, Fernando M. Silva, Jason R. Beringer, Xiangyang Wu | 2020-09-15 |
| 10087520 | Implantation using solid aluminum iodide (AlI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products | Dennis Elliott Kamenitsa, Fernando M. Silva, Neil K. Colvin | 2018-10-02 |
| 8270142 | De-clamping wafers from an electrostatic chuck | William D. Lee, Ashwin M. Purohit, Marvin R. LaFontaine | 2012-09-18 |
| 8023247 | Electrostatic chuck with compliant coat | Ashwin M. Purohit, Marvin R. LaFontaine, William D. Lee | 2011-09-20 |
| 6515290 | Bulk gas delivery system for ion implanters | James P. Quill | 2003-02-04 |