RR

Richard J. Rzeszut

AT Axcelis Technologies: 7 patents #35 of 300Top 15%
📍 Billerica, MA: #108 of 621 inventorsTop 20%
🗺 Massachusetts: #17,885 of 88,656 inventorsTop 25%
Overall (All Time): #709,220 of 4,157,543Top 20%
7
Patents All Time

Issued Patents All Time

Showing 1–7 of 7 patents

Patent #TitleCo-InventorsDate
11276543 Hydrogen generator for an ion implanter Neil K. Colvin, Tseh-Jen Hsieh, Wendy Colby 2022-03-15
10847339 Hydrogen generator for an ion implanter Neil K. Colvin, Tseh-Jen Hsieh, Wendy Colby 2020-11-24
10774419 Implantation using solid aluminum iodide (ALI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products Dennis Elliott Kamenitsa, Fernando M. Silva, Jason R. Beringer, Xiangyang Wu 2020-09-15
10087520 Implantation using solid aluminum iodide (AlI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products Dennis Elliott Kamenitsa, Fernando M. Silva, Neil K. Colvin 2018-10-02
8270142 De-clamping wafers from an electrostatic chuck William D. Lee, Ashwin M. Purohit, Marvin R. LaFontaine 2012-09-18
8023247 Electrostatic chuck with compliant coat Ashwin M. Purohit, Marvin R. LaFontaine, William D. Lee 2011-09-20
6515290 Bulk gas delivery system for ion implanters James P. Quill 2003-02-04