Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12353001 | Fiber noise cancellation | Josue Davila-Rodriguez | 2025-07-08 |
| 9281227 | Multi-resistivity Johnsen-Rahbek electrostatic clamp | Ashwin M. Purohit | 2016-03-08 |
| 9048276 | Matched coefficient of thermal expansion for an electrostatic chuck | Ashwin M. Purohit | 2015-06-02 |
| 9036326 | Gas bearing electrostatic chuck | Marvin R. LaFontaine, Ashwin M. Purohit, Joseph Gillespie, Donovan Beckel, Teng-Chao David Tao +2 more | 2015-05-19 |
| 8902560 | Electrostatic chuck ground punch | David B. Smith, Marvin R. LaFontaine, Ashwin M. Purohit | 2014-12-02 |
| 8422193 | Annulus clamping and backside gas cooled electrostatic chuck | Teng-Chao David Tao, Marvin R. LaFontaine, Ashwin M. Purohit | 2013-04-16 |
| 8270142 | De-clamping wafers from an electrostatic chuck | Ashwin M. Purohit, Marvin R. LaFontaine, Richard J. Rzeszut | 2012-09-18 |
| 8241425 | Non-condensing thermos chuck | Ashwin M. Purohit, Marvin R. LaFontaine | 2012-08-14 |
| 8182861 | Methods and devices for monitoring and controlling thin film processing | Dale C. Ness, Alan D. Streater | 2012-05-22 |
| 8023247 | Electrostatic chuck with compliant coat | Ashwin M. Purohit, Marvin R. LaFontaine, Richard J. Rzeszut | 2011-09-20 |
| 7952851 | Wafer grounding method for electrostatic clamps | Marvin R. LaFontaine, Ari Eiriksson, Ashwin M. Purohit | 2011-05-31 |
| 7828929 | Methods and devices for monitoring and controlling thin film processing | Dale C. Ness, Alan D. Streater | 2010-11-09 |
| 7787505 | Multi-longitudinal mode laser providing polarization control | Quentin A. Turchette | 2010-08-31 |