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Fiber noise cancellation |
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Ashwin M. Purohit |
2016-03-08 |
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Matched coefficient of thermal expansion for an electrostatic chuck |
Ashwin M. Purohit |
2015-06-02 |
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Gas bearing electrostatic chuck |
Marvin R. LaFontaine, Ashwin M. Purohit, Joseph Gillespie, Donovan Beckel, Teng-Chao David Tao +2 more |
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David B. Smith, Marvin R. LaFontaine, Ashwin M. Purohit |
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Annulus clamping and backside gas cooled electrostatic chuck |
Teng-Chao David Tao, Marvin R. LaFontaine, Ashwin M. Purohit |
2013-04-16 |
| 8270142 |
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Ashwin M. Purohit, Marvin R. LaFontaine, Richard J. Rzeszut |
2012-09-18 |
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Ashwin M. Purohit, Marvin R. LaFontaine |
2012-08-14 |
| 8182861 |
Methods and devices for monitoring and controlling thin film processing |
Dale C. Ness, Alan D. Streater |
2012-05-22 |
| 8023247 |
Electrostatic chuck with compliant coat |
Ashwin M. Purohit, Marvin R. LaFontaine, Richard J. Rzeszut |
2011-09-20 |
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2011-05-31 |
| 7828929 |
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Dale C. Ness, Alan D. Streater |
2010-11-09 |
| 7787505 |
Multi-longitudinal mode laser providing polarization control |
Quentin A. Turchette |
2010-08-31 |