Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9558980 | Vapor compression refrigeration chuck for ion implanters | William Davis Lee, Ashwin M. Purohit | 2017-01-31 |
| 9036326 | Gas bearing electrostatic chuck | William D. Lee, Ashwin M. Purohit, Joseph Gillespie, Donovan Beckel, Teng-Chao David Tao +2 more | 2015-05-19 |
| 8902560 | Electrostatic chuck ground punch | David B. Smith, William D. Lee, Ashwin M. Purohit | 2014-12-02 |
| 8422193 | Annulus clamping and backside gas cooled electrostatic chuck | Teng-Chao David Tao, William D. Lee, Ashwin M. Purohit | 2013-04-16 |
| 8270142 | De-clamping wafers from an electrostatic chuck | William D. Lee, Ashwin M. Purohit, Richard J. Rzeszut | 2012-09-18 |
| 8241425 | Non-condensing thermos chuck | William D. Lee, Ashwin M. Purohit | 2012-08-14 |
| 8023247 | Electrostatic chuck with compliant coat | Ashwin M. Purohit, William D. Lee, Richard J. Rzeszut | 2011-09-20 |
| 7952851 | Wafer grounding method for electrostatic clamps | Ari Eiriksson, Ashwin M. Purohit, William D. Lee | 2011-05-31 |
| 7828504 | Combination load lock for handling workpieces | Michel Pharand, Klaus Becker, Klaus Petry, Michael R. Mitrano | 2010-11-09 |
| 7714406 | Low-cost electrostatic clamp with fast de-clamp time | Michael Pharand, Leonard M. Rubin, Klaus Becker | 2010-05-11 |
| 7560705 | Workpiece handling scan arm for ion implantation system | Ari Eiriksson, Donovan Beckel, Robert J. Mitchell, Michel Pharand, Ashwin M. Purohit +4 more | 2009-07-14 |
| 5838012 | Charge exchange cell | Nobuhiro Tokoro, Victor Quattrini, Daniel BISSONNETTE, Takao Sakase | 1998-11-17 |