Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9036326 | Gas bearing electrostatic chuck | William D. Lee, Marvin R. LaFontaine, Ashwin M. Purohit, Joseph Gillespie, Teng-Chao David Tao +2 more | 2015-05-19 |
| 8168941 | Ion beam angle calibration and emittance measurement system for ribbon beams | Marvin Farley, Donald N. Polner, Geoffrey Ryding, Theodore H. Smick, Takao Sakase +5 more | 2012-05-01 |
| 7560705 | Workpiece handling scan arm for ion implantation system | Ari Eiriksson, Robert J. Mitchell, Michel Pharand, Marvin R. LaFontaine, Ashwin M. Purohit +4 more | 2009-07-14 |