DP

Donald N. Polner

AT Axcelis Technologies: 4 patents #61 of 300Top 25%
Overall (All Time): #1,014,578 of 4,157,543Top 25%
5
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
8500382 Airflow management for particle abatement in semiconductor manufacturing equipment James S. Castantini, Tent-Chao D. Tao, Erin Madden 2013-08-06
8225527 Cooling apparatus for a web deposition system Piero Sferlazzo, Darren M. Simonelli 2012-07-24
8168941 Ion beam angle calibration and emittance measurement system for ribbon beams Marvin Farley, Geoffrey Ryding, Theodore H. Smick, Takao Sakase, Ronald Horner +5 more 2012-05-01
7321299 Workpiece handling alignment system Kevin Verrier, David Bernhardt, Jerry Negrotti 2008-01-22
6207964 Continuously variable aperture for high-energy ion implanter Edward K. McIntyre, Donald E. DeLuca, Gerald L. Dionne, Paul A. Loomis, Hans J. Rutishauser +1 more 2001-03-27