Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653266 | Microwave plasma applicator with improved power uniformity | Xing Chen, Chengxiang Ji, Ilya Pokidov, Kevin W. Wenzel | 2017-05-16 |
| 8500382 | Airflow management for particle abatement in semiconductor manufacturing equipment | James S. Castantini, Tent-Chao D. Tao, Donald N. Polner | 2013-08-06 |