Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12289820 | Method and apparatus for impedance matching in a power delivery system for remote plasma generation | Mohammad Kamarehi, Kenneth B. Trenholm, Fedir Viktorovych Teplyuk | 2025-04-29 |
| 12207385 | Method and apparatus for plasma ignition in toroidal plasma sources | Chiu-Ying Tai, Joseph Desjardins, Gordon Hill, Michael Harris | 2025-01-21 |
| 12075554 | Plasma source having a dielectric plasma chamber with improved plasma resistance | Xing Chen, Atul Gupta | 2024-08-27 |
| 11956885 | Method and apparatus for impedance matching in a power delivery system for remote plasma generation | Mohammad Kamarehi, Kenneth B. Trenholm, Fedir Viktorovych Teplyuk | 2024-04-09 |
| 11019715 | Plasma source having a dielectric plasma chamber with improved plasma resistance | Xing Chen, Atul Gupta | 2021-05-25 |
| 10940635 | Method and apparatus for processing dielectric materials using microwave energy | Xing Chen, David Lam, Kevin W. Wenzel | 2021-03-09 |
| 10071521 | Method and apparatus for processing dielectric materials using microwave energy | Xing Chen, David Lam, Kevin W. Wenzel | 2018-09-11 |
| 9991098 | Toroidal plasma abatement apparatus and method | Xing Chen, Feng Tian, Ken Tran, David Lam, Kevin W. Wenzel | 2018-06-05 |
| 9653266 | Microwave plasma applicator with improved power uniformity | Xing Chen, Chengxiang Ji, Erin Madden, Kevin W. Wenzel | 2017-05-16 |
| 9630142 | Toroidal plasma abatement apparatus and method | Xing Chen, Feng Tian, Ken Tran, David Lam, Kevin W. Wenzel | 2017-04-25 |
| 7915597 | Extraction electrode system for high current ion implanter | Yongzhang Huang | 2011-03-29 |
| 7435971 | Ion source | Bo H. Vanderberg, Victor M. Beneviste, John F. Fallon | 2008-10-14 |