Issued Patents All Time
Showing 25 most recent of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114270 | Scanning magnet design with enhanced efficiency | Edward C. Eisner | 2021-09-07 |
| 11037754 | Scan and corrector magnet designs for high throughput scanned beam ion implanter | Edward C. Eisner | 2021-06-15 |
| 10573485 | Tetrode extraction apparatus for ion source | Wilhelm Platow, Edward C. Eisner, Neil J. Bassom, Michael Cristoforo, Joshua Abeshaus | 2020-02-25 |
| 10553392 | Scan and corrector magnet designs for high throughput scanned beam ion implanter | Edward C. Eisner | 2020-02-04 |
| 10483086 | Beam profiling speed enhancement for scanned beam implanters | Andy Ray, Edward C. Eisner | 2019-11-19 |
| 10037877 | Ion implantation system having beam angle control in drift and deceleration modes | Edward C. Eisner | 2018-07-31 |
| 9711329 | System and method to improve productivity of hybrid scan ion beam implanters | Andy Ray | 2017-07-18 |
| 9679739 | Combined electrostatic lens system for ion implantation | Edward C. Eisner | 2017-06-13 |
| 9443698 | Hybrid scanning for ion implantation | — | 2016-09-13 |
| 9318302 | Integrated extraction electrode manipulator for ion source | Joseph Valinski, Michael Cristoforo | 2016-04-19 |
| 8963107 | Beam line design to reduce energy contamination | Edward C. Eisner | 2015-02-24 |
| 8760054 | Microwave plasma electron flood | William F. DiVergilio | 2014-06-24 |
| 8637838 | System and method for ion implantation with improved productivity and uniformity | Edward C. Eisner | 2014-01-28 |
| 8502173 | System and method for ion implantation with improved productivity and uniformity | Steven C. Hays, Andy Ray | 2013-08-06 |
| 8378313 | Uniformity of a scanned ion beam | Edward C. Eisner, Andy Ray | 2013-02-19 |
| 8278634 | System and method for ion implantation with improved productivity and uniformity | Steven C. Hays, Andy Ray | 2012-10-02 |
| 8237135 | Enhanced low energy ion beam transport in ion implantation | William F. DiVergilio | 2012-08-07 |
| 8138484 | Magnetic scanning system with improved efficiency | — | 2012-03-20 |
| 8124947 | Ion implanter having combined hybrid and double mechanical scan architecture | Manny Sieradzki, Patrick Splinter | 2012-02-28 |
| 8124946 | Post-decel magnetic energy filter for ion implantation systems | Geoffrey Ryding, Theodore H. Smick, Marvin Farley, Takao Sakase | 2012-02-28 |
| 7897944 | Method and apparatus for measurement of beam angle in ion implantation | Robert J. Mitchell | 2011-03-01 |
| 7800083 | Plasma electron flood for ion beam implanter | William F. DiVergilio | 2010-09-21 |
| 7750320 | System and method for two-dimensional beam scan across a workpiece of an ion implanter | Joseph Ferrara, Michael Graf | 2010-07-06 |
| 7701230 | Method and system for ion beam profiling | John Zheng Ye, Michael Cristoforo, Yongzhang Huang, Michael Graf | 2010-04-20 |
| 7696494 | Beam angle adjustment in ion implanters | Xiangyang Wu | 2010-04-13 |