Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8183539 | High mass resolution low aberration analyzer magnet for ribbon beams and the system for ribbon beam ion implanter | Xinping Hu | 2012-05-22 |
| 7994488 | Low contamination, low energy beamline architecture for high current ion implantation | — | 2011-08-09 |
| 7915597 | Extraction electrode system for high current ion implanter | Ilya Pokidov | 2011-03-29 |
| 7701230 | Method and system for ion beam profiling | John Zheng Ye, Michael Cristoforo, Michael Graf, Bo H. Vanderberg | 2010-04-20 |
| 7655930 | Ion source arc chamber seal | Neil K. Colvin, Kevin J. Hoyt | 2010-02-02 |
| 7579604 | Beam stop and beam tuning methods | John W. Vanderpot | 2009-08-25 |
| 7566887 | Method of reducing particle contamination for ion implanters | Que Weiguo, Zhang Jincheng | 2009-07-28 |
| 7557363 | Closed loop dose control for ion implantation | Brian S. Freer, John Zheng Ye, Christopher Godfrey, Michael Graf, Patrick Splinter | 2009-07-07 |
| 7547899 | Charged beam dump and particle attractor | John W. Vanderpot | 2009-06-16 |
| 7507977 | System and method of ion beam control in response to a beam glitch | Que Weiguo, John Zheng Ye, David Tao, Patrick Splinter | 2009-03-24 |
| 7488958 | High conductance ion source | — | 2009-02-10 |
| 7476855 | Beam tuning with automatic magnet pole rotation for ion implanters | — | 2009-01-13 |
| 6881966 | Hybrid magnetic/electrostatic deflector for ion implantation systems | Victor M. Benveniste, Robert D. Rathmell | 2005-04-19 |
| 6835930 | High mass resolution magnet for ribbon beam ion implanters | Victor M. Benveniste | 2004-12-28 |
| 6777696 | Deflecting acceleration/deceleration gap | Robert D. Rathmell, Bo H. Vanderberg | 2004-08-17 |
| 6774378 | Method of tuning electrostatic quadrupole electrodes of an ion beam implanter | Xiangyang Wu, Hans J. Rutishauser | 2004-08-10 |
| 6770888 | High mass resolution magnet for ribbon beam ion implanters | Victor M. Benveniste | 2004-08-03 |
| 6441382 | Deceleration electrode configuration for ultra-low energy ion implanter | — | 2002-08-27 |