| 7579604 |
Beam stop and beam tuning methods |
Yongzhang Huang |
2009-08-25 |
| 7547899 |
Charged beam dump and particle attractor |
Yongzhang Huang |
2009-06-16 |
| 7547898 |
Particulate prevention in ion implantation |
Donald W. Berrian |
2009-06-16 |
| 7381977 |
Ion beam profiler |
John D. Pollock, Donald W. Berrian |
2008-06-03 |
| 7323695 |
Reciprocating drive for scanning a workpiece |
John D. Pollock, Donald W. Berrian |
2008-01-29 |
| 7141809 |
Method for reciprocating a workpiece through an ion beam |
John D. Pollock, Donald W. Berrian |
2006-11-28 |
| 7135691 |
Reciprocating drive for scanning a workpiece through an ion beam |
John D. Pollock, Donald W. Berrian |
2006-11-14 |
| 6921907 |
Substrate positioning system |
Donald W. Berrian, John D. Pollock |
2005-07-26 |
| 6777687 |
Substrate positioning system |
Donald W. Berrian, John D. Pollock |
2004-08-17 |
| 6765219 |
Hybrid scanning system and methods for ion implantation |
Donald W. Berrian, John D. Pollock |
2004-07-20 |
| 6428262 |
Compact load lock system for ion beam processing of foups |
John D. Pollock |
2002-08-06 |
| 6172372 |
Scanning system with linear gas bearings and active counter-balance options |
— |
2001-01-09 |
| 6082297 |
Encapsulated thermofoil heater apparatus and associated methods |
John D. Pollock |
2000-07-04 |
| 5984391 |
Microfeature wafer handling apparatus and methods |
John D. Pollock |
1999-11-16 |
| RE36200 |
Disposable electronic monitor device |
Donald W. Berrian, Ernest Santin, William A. Tout, Peter M. Nunes |
1999-04-27 |
| 5789867 |
Apparatus and method for igniting plasma in a process module |
Han Westendorp, Hans Meiling, Donald W. Berrian |
1998-08-04 |
| 5595784 |
Titanium nitride and multilayers formed by chemical vapor deposition of titanium halides |
Robert Kaim |
1997-01-21 |
| 5565036 |
Apparatus and method for igniting plasma in a process module |
Han Westendorp, Hans Meiling, Donald W. Berrian |
1996-10-15 |
| 5313848 |
Disposable electronic monitor device |
Ernest Santin, William A. Tout, Peter M. Nunes, Donald W. Berrian |
1994-05-24 |
| 4980562 |
Method and apparatus for high efficiency scanning in an ion implanter |
Donald W. Berrian, Robert Kaim |
1990-12-25 |
| 4922106 |
Ion beam scanning method and apparatus |
Donald W. Berrian, Robert Kaim |
1990-05-01 |