Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7579604 | Beam stop and beam tuning methods | Yongzhang Huang | 2009-08-25 |
| 7547899 | Charged beam dump and particle attractor | Yongzhang Huang | 2009-06-16 |
| 7547898 | Particulate prevention in ion implantation | Donald W. Berrian | 2009-06-16 |
| 7381977 | Ion beam profiler | John D. Pollock, Donald W. Berrian | 2008-06-03 |
| 7323695 | Reciprocating drive for scanning a workpiece | John D. Pollock, Donald W. Berrian | 2008-01-29 |
| 7141809 | Method for reciprocating a workpiece through an ion beam | John D. Pollock, Donald W. Berrian | 2006-11-28 |
| 7135691 | Reciprocating drive for scanning a workpiece through an ion beam | John D. Pollock, Donald W. Berrian | 2006-11-14 |
| 6921907 | Substrate positioning system | Donald W. Berrian, John D. Pollock | 2005-07-26 |
| 6777687 | Substrate positioning system | Donald W. Berrian, John D. Pollock | 2004-08-17 |
| 6765219 | Hybrid scanning system and methods for ion implantation | Donald W. Berrian, John D. Pollock | 2004-07-20 |
| 6428262 | Compact load lock system for ion beam processing of foups | John D. Pollock | 2002-08-06 |
| 6172372 | Scanning system with linear gas bearings and active counter-balance options | — | 2001-01-09 |
| 6082297 | Encapsulated thermofoil heater apparatus and associated methods | John D. Pollock | 2000-07-04 |
| 5984391 | Microfeature wafer handling apparatus and methods | John D. Pollock | 1999-11-16 |
| RE36200 | Disposable electronic monitor device | Donald W. Berrian, Ernest Santin, William A. Tout, Peter M. Nunes | 1999-04-27 |
| 5789867 | Apparatus and method for igniting plasma in a process module | Han Westendorp, Hans Meiling, Donald W. Berrian | 1998-08-04 |
| 5595784 | Titanium nitride and multilayers formed by chemical vapor deposition of titanium halides | Robert Kaim | 1997-01-21 |
| 5565036 | Apparatus and method for igniting plasma in a process module | Han Westendorp, Hans Meiling, Donald W. Berrian | 1996-10-15 |
| 5313848 | Disposable electronic monitor device | Ernest Santin, William A. Tout, Peter M. Nunes, Donald W. Berrian | 1994-05-24 |
| 4980562 | Method and apparatus for high efficiency scanning in an ion implanter | Donald W. Berrian, Robert Kaim | 1990-12-25 |
| 4922106 | Ion beam scanning method and apparatus | Donald W. Berrian, Robert Kaim | 1990-05-01 |