John W. Vanderpot — 21 Patents at Axcelis Technologies

John W. Vanderpot has been granted 21 US patents while listed as an inventor at Axcelis Technologies. The first was granted in 1990 and the most recent in August 2009. John W. Vanderpot ranks #201,324 of 4,157,543 US inventors in our database (top 4.8%). Patent records list John W. Vanderpot in Rockport, MA, US.

Issued Patents All Time

Showing 1–21 of 21 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
7579604	Beam stop and beam tuning methods	Yongzhang Huang	2009-08-25	$3,050,000
7547899	Charged beam dump and particle attractor	Yongzhang Huang	2009-06-16	$1,152,000
7547898	Particulate prevention in ion implantation	Donald W. Berrian	2009-06-16	$1,152,000
7381977	Ion beam profiler	John D. Pollock, Donald W. Berrian	2008-06-03	$2,275,000
7323695	Reciprocating drive for scanning a workpiece	John D. Pollock, Donald W. Berrian	2008-01-29	$4,073,000
7141809	Method for reciprocating a workpiece through an ion beam	John D. Pollock, Donald W. Berrian	2006-11-28	$7,019,000
7135691	Reciprocating drive for scanning a workpiece through an ion beam	John D. Pollock, Donald W. Berrian	2006-11-14	$7,427,000
6921907	Substrate positioning system	Donald W. Berrian, John D. Pollock	2005-07-26	$7,566,000
6777687	Substrate positioning system	Donald W. Berrian, John D. Pollock	2004-08-17	$5,436,000
6765219	Hybrid scanning system and methods for ion implantation	Donald W. Berrian, John D. Pollock	2004-07-20	$11,278,000
6428262	Compact load lock system for ion beam processing of foups	John D. Pollock	2002-08-06	$560,000
6172372	Scanning system with linear gas bearings and active counter-balance options	—	2001-01-09	$21,397,000
6082297	Encapsulated thermofoil heater apparatus and associated methods	John D. Pollock	2000-07-04
5984391	Microfeature wafer handling apparatus and methods	John D. Pollock	1999-11-16	$29,582,000
RE36200	Disposable electronic monitor device	Donald W. Berrian, Ernest Santin, William A. Tout, Peter M. Nunes	1999-04-27
5789867	Apparatus and method for igniting plasma in a process module	Han Westendorp, Hans Meiling, Donald W. Berrian	1998-08-04
5595784	Titanium nitride and multilayers formed by chemical vapor deposition of titanium halides	Robert Kaim	1997-01-21
5565036	Apparatus and method for igniting plasma in a process module	Han Westendorp, Hans Meiling, Donald W. Berrian	1996-10-15
5313848	Disposable electronic monitor device	Ernest Santin, William A. Tout, Peter M. Nunes, Donald W. Berrian	1994-05-24
4980562	Method and apparatus for high efficiency scanning in an ion implanter	Donald W. Berrian, Robert Kaim	1990-12-25
4922106	Ion beam scanning method and apparatus	Donald W. Berrian, Robert Kaim	1990-05-01	$2,521,000

John W. Vanderpot — 21 Patents

Issued Patents All Time

Patent Widget