Issued Patents All Time
Showing 25 most recent of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11062906 | Silicon implantation in substrates and provision of silicon precursor compositions therefor | Ying Tang, Joseph D. Sweeney, Tianniu Chen, James J. Mayer, Richard S. Ray +2 more | 2021-07-13 |
| 10497569 | Carbon materials for carbon implantation | Joseph D. Sweeney, Oleg Byl | 2019-12-03 |
| 9991095 | Ion source cleaning in semiconductor processing systems | Joseph D. Sweeney, Sharad N. Yedave, Oleg Byl, David Eldridge, Lin Feng +3 more | 2018-06-05 |
| 9754786 | Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system | Joseph D. Sweeney, Anthony M. Avila, Richard S. Ray | 2017-09-05 |
| 9748072 | Lower dose rate ion implantation using a wider ion beam | Zhimin Wan, Rekha Padmanabhan, Xiao Bai, Gary N. Cai, Ching-I Li +4 more | 2017-08-29 |
| 9685304 | Isotopically-enriched boron-containing compounds, and methods of making and using same | Joseph D. Sweeney, Oleg Byl, Sharad N. Yedave, Edward E. Jones, Peng Zou +3 more | 2017-06-20 |
| 9455147 | Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation | W. Karl Olander, Jose I. Arno | 2016-09-27 |
| 9269528 | Medium current ribbon beam for ion implantation | Charles M. Free, David E. Hoglund, Wilhelm P. Platow, Kourosh Saadatmand | 2016-02-23 |
| 9170246 | Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel | James Dietz, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski +1 more | 2015-10-27 |
| 9171725 | Enriched silicon precursor compositions and apparatus and processes for utilizing same | James J. Mayer, Richard S. Ray, Joseph D. Sweeney | 2015-10-27 |
| 9142387 | Isotopically-enriched boron-containing compounds, and methods of making and using same | Joseph D. Sweeney, Oleg Byl, Sharad N. Yedave, Edward E. Jones, Peng Zou +3 more | 2015-09-22 |
| 9111860 | Ion implantation system and method | Edward E. Jones, Sharad N. Yedave, Ying Tang, Barry Lewis Chambers, Joseph D. Sweeney +2 more | 2015-08-18 |
| 9012874 | Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system | Joseph D. Sweeney, Anthony M. Avila, Richard S. Ray | 2015-04-21 |
| 8796131 | Ion implantation system and method | Edward E. Jones, Sharad N. Yedave, Ying Tang, Barry Lewis Chambers, Joseph D. Sweeney +2 more | 2014-08-05 |
| 8785889 | Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system | Joseph D. Sweeney, Anthony M. Avila, Richard S. Ray | 2014-07-22 |
| 8779383 | Enriched silicon precursor compositions and apparatus and processes for utilizing same | James J. Mayer, Richard S. Ray, Joseph D. Sweeney | 2014-07-15 |
| 8603252 | Cleaning of semiconductor processing systems | Frank Dimeo, Jr., James Dietz, W. Karl Olander, Steven E. Bishop, Jeffrey W. Neuner +7 more | 2013-12-10 |
| 8598022 | Isotopically-enriched boron-containing compounds, and methods of making and using same | Joseph D. Sweeney, Oleg Byl, Sharad N. Yedave, Edward E. Jones, Peng Zou +3 more | 2013-12-03 |
| 8555705 | Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel | James Dietz, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski +1 more | 2013-10-15 |
| 8399865 | Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system | Joseph D. Sweeney, Anthony M. Avila, Richard S. Ray | 2013-03-19 |
| 8389068 | Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation | W. Karl Olander, Jose I. Arno | 2013-03-05 |
| 8237134 | Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system | Joseph D. Sweeney, Anthony M. Avila, Richard S. Ray | 2012-08-07 |
| 8138071 | Isotopically-enriched boron-containing compounds, and methods of making and using same | Joseph D. Sweeney, Oleg Byl, Sharad N. Yedave, Edward E. Jones, Peng Zou +3 more | 2012-03-20 |
| 8062965 | Isotopically-enriched boron-containing compounds, and methods of making and using same | Joseph D. Sweeney, Oleg Byl, Sharad N. Yedave, Edward E. Jones, Peng Zou +3 more | 2011-11-22 |
| 7966879 | Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel | James Dietz, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski +1 more | 2011-06-28 |