Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421122 | Gas storage systems and method thereof | Diego Troya, Nathan B. Jones, John Robert Morris | 2025-09-23 |
| 12347639 | Method and systems useful for producing aluminum ions | Ying Tang, Joseph R. Despres, Joseph D. Sweeney, Barry Lewis Chambers | 2025-07-01 |
| 12196368 | Storage and delivery veseel for storing GeH4, using a zeolitic adsorbent | — | 2025-01-14 |
| 12140272 | Systems and methods for storing molecular diborane | John Robert Morris, Nathan B. Jones, Diego Troya | 2024-11-12 |
| 11881376 | Method and systems useful for producing aluminum ions | Ying Tang, Joe R. Despres, Joseph D. Sweeney, Barry Lewis Chambers | 2024-01-23 |
| 11827973 | Germanium tetraflouride and hydrogen mixtures for an ion implantation system | Ying Tang, Joseph R. Despres, Joseph D. Sweeney, Sharad N. Yedave | 2023-11-28 |
| 11682540 | Ion implantation system with mixture of arc chamber materials | Ying Tang, Sharad N. Yedave, Joseph R. Despres, Joseph D. Sweeney | 2023-06-20 |
| 11621148 | Plasma immersion methods for ion implantation | Ying Tang, Bryan C. Hendrix, Sharad N. Yedave | 2023-04-04 |
| 11299802 | Germanium tetraflouride and hydrogen mixtures for an ion implantation system | Ying Tang, Joseph R. Despres, Joseph D. Sweeney, Sharad N. Yedave | 2022-04-12 |
| 11139145 | Ion implantation system with mixture of arc chamber materials | Ying Tang, Sharad N. Yedave, Joseph R. Despres, Joseph D. Sweeney | 2021-10-05 |
| 11062906 | Silicon implantation in substrates and provision of silicon precursor compositions therefor | Ying Tang, Joseph D. Sweeney, Tianniu Chen, James J. Mayer, Richard S. Ray +2 more | 2021-07-13 |
| 10892137 | Ion implantation processes and apparatus using gallium | Joseph D. Sweeney, Joseph R. Despres, Ying Tang, Sharad N. Yedave, Edward E. Jones | 2021-01-12 |
| 10497569 | Carbon materials for carbon implantation | Joseph D. Sweeney, Robert Kaim | 2019-12-03 |
| 10497532 | Ion implantation processes and apparatus | Joseph D. Sweeney | 2019-12-03 |
| 10354877 | Carbon dopant gas and co-flow for implant beam and source life performance improvement | Edward A. Sturm, Ying Tang, Sharad N. Yedave, Joseph D. Sweeney, Steven G. Sergi +1 more | 2019-07-16 |
| 10109488 | Phosphorus or arsenic ion implantation utilizing enhanced source techniques | Sharad N. Yedave, Joseph D. Sweeney, Barry Lewis Chambers, Ying Tang | 2018-10-23 |
| 9996090 | Preparation of high pressure BF3/H2 mixtures | Joseph D. Sweeney | 2018-06-12 |
| 9991095 | Ion source cleaning in semiconductor processing systems | Joseph D. Sweeney, Sharad N. Yedave, Robert Kaim, David Eldridge, Lin Feng +3 more | 2018-06-05 |
| 9960042 | Carbon dopant gas and co-flow for implant beam and source life performance improvement | Edward A. Sturm, Ying Tang, Sharad N. Yedave, Joseph D. Sweeney, Steven G. Sergi +1 more | 2018-05-01 |
| 9938156 | B2F4 manufacturing process | Edward E. Jones, Chiranjeevi Pydi, Joseph D. Sweeney | 2018-04-10 |
| 9831063 | Ion implantation compositions, systems, and methods | Joseph D. Sweeney, Ying Tang, Richard S. Ray | 2017-11-28 |
| 9764298 | Apparatus and method for preparation of compounds or intermediates thereof from a solid material, and using such compounds and intermediates | Edward E. Jones, Chiranjeevi Pydi, Joseph D. Sweeney | 2017-09-19 |
| 9685304 | Isotopically-enriched boron-containing compounds, and methods of making and using same | Robert Kaim, Joseph D. Sweeney, Sharad N. Yedave, Edward E. Jones, Peng Zou +3 more | 2017-06-20 |
| 9269582 | Cluster ion implantation of arsenic and phosphorus | Chongying Xu, William Hunks, Richard S. Ray | 2016-02-23 |
| 9205392 | Apparatus and method for preparation of compounds or intermediates thereof from a solid material, and using such compounds and intermediates | Edward E. Jones, Chiranjeevi Pydi, Joseph D. Sweeney | 2015-12-08 |