Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10354877 | Carbon dopant gas and co-flow for implant beam and source life performance improvement | Oleg Byl, Edward A. Sturm, Ying Tang, Sharad N. Yedave, Joseph D. Sweeney +1 more | 2019-07-16 |
| 9960042 | Carbon dopant gas and co-flow for implant beam and source life performance improvement | Oleg Byl, Edward A. Sturm, Ying Tang, Sharad N. Yedave, Joseph D. Sweeney +1 more | 2018-05-01 |