Issued Patents All Time
Showing 25 most recent of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347639 | Method and systems useful for producing aluminum ions | Joseph R. Despres, Joseph D. Sweeney, Oleg Byl, Barry Lewis Chambers | 2025-07-01 |
| 11881376 | Method and systems useful for producing aluminum ions | Joe R. Despres, Joseph D. Sweeney, Oleg Byl, Barry Lewis Chambers | 2024-01-23 |
| 11881386 | Coating device for curved substrate and coating method containing the same | Ching-Feng Kuo, Chin-Lung Ting | 2024-01-23 |
| 11827973 | Germanium tetraflouride and hydrogen mixtures for an ion implantation system | Oleg Byl, Joseph R. Despres, Joseph D. Sweeney, Sharad N. Yedave | 2023-11-28 |
| 11682540 | Ion implantation system with mixture of arc chamber materials | Sharad N. Yedave, Joseph R. Despres, Joseph D. Sweeney, Oleg Byl | 2023-06-20 |
| 11621148 | Plasma immersion methods for ion implantation | Bryan C. Hendrix, Oleg Byl, Sharad N. Yedave | 2023-04-04 |
| 11538687 | Fluorine ion implantation system with non-tungsten materials and methods of using | Sharad N. Yedave, Joseph R. Despres, Joseph D. Sweeney | 2022-12-27 |
| 11315791 | Fluorine ion implantation method and system | Sharad N. Yedave | 2022-04-26 |
| 11299802 | Germanium tetraflouride and hydrogen mixtures for an ion implantation system | Oleg Byl, Joseph R. Despres, Joseph D. Sweeney, Sharad N. Yedave | 2022-04-12 |
| 11139145 | Ion implantation system with mixture of arc chamber materials | Sharad N. Yedave, Joseph R. Despres, Joseph D. Sweeney, Oleg Byl | 2021-10-05 |
| 11062906 | Silicon implantation in substrates and provision of silicon precursor compositions therefor | Joseph D. Sweeney, Tianniu Chen, James J. Mayer, Richard S. Ray, Oleg Byl +2 more | 2021-07-13 |
| 10920087 | Hydrogenated isotopically enriched boront trifluoride dopant source gas composition | Steven E. Bishop, Sharad N. Yedave, Oleg Bly, Joseph D. Sweeney | 2021-02-16 |
| 10892137 | Ion implantation processes and apparatus using gallium | Joseph D. Sweeney, Joseph R. Despres, Sharad N. Yedave, Edward E. Jones, Oleg Byl | 2021-01-12 |
| 10823901 | Display device and methods for forming the same | I-Chang LIANG, I-Jung Lin, Yuan-Jen Cheng, Tsu-Hsien KU, Fang-Cheng Jhou +3 more | 2020-11-03 |
| 10622192 | Methods and assemblies using fluorine containing and inert gases for plasma flood gun operation | Sharad N. Yedave, Joseph R. Despres, Joseph D. Sweeney | 2020-04-14 |
| 10502887 | Display device and methods for forming the same | I-Chang LIANG, I-Jung Lin, Yuan-Jen Cheng, Tsu-Hsien KU, Fang-Cheng Jhou +3 more | 2019-12-10 |
| 10354877 | Carbon dopant gas and co-flow for implant beam and source life performance improvement | Oleg Byl, Edward A. Sturm, Sharad N. Yedave, Joseph D. Sweeney, Steven G. Sergi +1 more | 2019-07-16 |
| 10229840 | Ion implanter comprising integrated ventilation system | W. Karl Olander, Barry Lewis Chambers, Steven E. Bishop | 2019-03-12 |
| 10109488 | Phosphorus or arsenic ion implantation utilizing enhanced source techniques | Oleg Byl, Sharad N. Yedave, Joseph D. Sweeney, Barry Lewis Chambers | 2018-10-23 |
| 9991095 | Ion source cleaning in semiconductor processing systems | Joseph D. Sweeney, Sharad N. Yedave, Oleg Byl, Robert Kaim, David Eldridge +3 more | 2018-06-05 |
| 9960042 | Carbon dopant gas and co-flow for implant beam and source life performance improvement | Oleg Byl, Edward A. Sturm, Sharad N. Yedave, Joseph D. Sweeney, Steven G. Sergi +1 more | 2018-05-01 |
| 9831063 | Ion implantation compositions, systems, and methods | Oleg Byl, Joseph D. Sweeney, Richard S. Ray | 2017-11-28 |
| 9685304 | Isotopically-enriched boron-containing compounds, and methods of making and using same | Robert Kaim, Joseph D. Sweeney, Oleg Byl, Sharad N. Yedave, Edward E. Jones +3 more | 2017-06-20 |
| 9142387 | Isotopically-enriched boron-containing compounds, and methods of making and using same | Robert Kaim, Joseph D. Sweeney, Oleg Byl, Sharad N. Yedave, Edward E. Jones +3 more | 2015-09-22 |
| 9111860 | Ion implantation system and method | Edward E. Jones, Sharad N. Yedave, Barry Lewis Chambers, Robert Kaim, Joseph D. Sweeney +2 more | 2015-08-18 |